Patents Assigned to Deposition Sciences, Inc.
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Patent number: 8133361Abstract: A method and system for depositing a thin film on a substrate. In the system a target material is deposited and reacted on a substrate surface to form a substantially non-absorbing thin film. The volume of non-absorbing thin film formed per unit of time may be increased by increasing the area of the surface by a factor of “x” and increasing the rate of deposition of the target material by a factor greater than the inverse of the factor “x” to thereby increase the rate of formation of the volume of non-absorbing thin film per unit of time.Type: GrantFiled: October 27, 2008Date of Patent: March 13, 2012Assignee: Deposition Sciences, Inc.Inventors: Norman L. Boling, Miles Rains, Howard Robert Gray
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Publication number: 20110232745Abstract: A photovoltaic solar cell having a multi-layer antireflective coating on an outer surface. The coating may include alternating layers of silicon dioxide and tantalum pentoxide and may have average front surface reflectance of less than five percent over the wavelength range from 300 nm to 1850 nm with the silicon dioxide having a refractive index less than 1.4 at a wavelength of 550 nm.Type: ApplicationFiled: March 23, 2011Publication date: September 29, 2011Applicant: Deposition Sciences, Inc.Inventors: Lucas Alves, Paul Morand
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Patent number: 7238262Abstract: A system and method of coating curved substrates and assembling devices having coated elements. The system and method are of particular utility in the manufacture of lamps having a coating formed on the hermetically sealed light emitting chamber of the lamp. The system and method includes, inter alia, an improved uniform coating process and apparatus, improved throughput in the coating process, a reduction in bad coating losses, improved baking processes, and an improved method and apparatus for aligning the filament of a halogen lamp achieved by performing the step of coating of the light emitting chamber prior to the step of sealing the chamber.Type: GrantFiled: March 29, 2000Date of Patent: July 3, 2007Assignee: Deposition Sciences, Inc.Inventors: Leroy A. Bartolomei, H. Robert Gray
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Patent number: 7232506Abstract: A system and method for feedforward control in thin film coating processes. A standard PID feedback control system that continuously monitors two or more process variables in a reactive sputtering process is combined with a feedforward control system to improve system performance. The control system enables much faster stabilization of the reactive sputtering process during target start-up, and improves control of the process once a steady-state operating condition has been reached following target start-up.Type: GrantFiled: October 8, 2004Date of Patent: June 19, 2007Assignee: Deposition Sciences, Inc.Inventors: Mark George, Evan Craves
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Patent number: 7008518Abstract: The present invention is directed at least in part to methods and apparatus for optically monitoring selected optical characteristics of coatings formed on substrates during the deposition process and controlling the deposition process responsive thereto. In one aspect, the system includes a retroreflector for reflecting an electromagnetic beam transmitted by the coating and substrate back through the substrate and coating before selected properties of the retroreflected beam are measured. The system and method improve the signal to noise properties of the measured beam. The present invention may be used in systems for coating one or an array of substrates, and is particularly suitable for deposition processes where the substrates are translated past the sources of material to be deposited, and wherein the angle of incidence of a monitor beam on the substrate changes as the substrate translates past the beam source.Type: GrantFiled: January 18, 2005Date of Patent: March 7, 2006Assignee: Deposition Sciences, Inc.Inventors: James Sternbergh, Eric M. Krisl, Norm L. Boling
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Patent number: 6485616Abstract: A system and method for coating substrates. The coating process includes an improved capacity and uniformity through the addition of a second motion component in which the substrates move in a closed path. A major portion of the path is linear and the configuration of the coating machine is such that all substrates follow the same trajectory with respect to the machine during the coating process, resulting in a coating which is substantially the same for all substrates.Type: GrantFiled: December 29, 1999Date of Patent: November 26, 2002Assignee: Deposition Sciences, Inc.Inventors: Bill Howard, Robert Gray
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Patent number: 6402902Abstract: A method for establishing and maintaining a reliable ground for reactive sputtering systems. A spatially extended high density plasma is generated in a large region surrounding the sputtering target. The plasma electrically connects the target to a part of the coating machine that is not subject to deposition of sputtered material from the target. The plasma is generated by an applicator which is independent of the target.Type: GrantFiled: February 13, 1995Date of Patent: June 11, 2002Assignee: Deposition Sciences, Inc.Inventor: Norman L. Boling
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Patent number: 6331914Abstract: An optical interference coating on a refractory substrate, the coating being comprised of alternating layers of silicon dioxide and zirconium dioxide. The coating can be in the form of an optical filter where a substrate bearing the coating can be repeatedly cycled between room temperature and a temperature of at least 1000° C. without significant degradation of its optical or mechanical properties.Type: GrantFiled: June 14, 1999Date of Patent: December 18, 2001Assignee: Deposition Sciences, Inc.Inventors: Byron A. Wood, II, William H. Howard
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Patent number: 6197428Abstract: An article useful as a gemstone or decorative object. A formed substrate is used as a base for an optical interference coating applied on the exterior of the substrate. The optical interference coating is made of alternating layers of materials with relatively high refractive indices and relatively low refractive indices, the refractive indices and thicknesses of the alternating layers being chosen so that at least part of the light of wavelengths between 400 nanometers and 700 nanometers incident on the article is reflected. The optical coating creates an interference filter formed of alternating layers of a material with a low refractive index and a material with a high refractive index. The article provides a visual appearance that is novel and different from other gemstones or decorative objects, either man-made or natural.Type: GrantFiled: August 26, 1994Date of Patent: March 6, 2001Assignee: Deposition Sciences, Inc.Inventor: Donald Z. Rogers
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Patent number: 6107564Abstract: An ultraviolet and infrared reflecting coating with a wide transmission band and a solar cell cover on which the coating has been deposited. The coating contains a multilayer bandpass filter, and some of the layers of this filter are comprised of mixed materials which have a selectable index of refraction. The design can be optimized by varying the index or refraction of at least one of the layers of mixed material.Type: GrantFiled: November 18, 1997Date of Patent: August 22, 2000Assignee: Deposition Sciences, Inc.Inventors: John A. Aguilera, William H. Howard, Matthew E. Krisl
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Patent number: 5923471Abstract: An optical interference coating on a refractory substrate, the coating being comprised of alternating layers of silicon dioxide and zirconium dioxide. The coating can be in the form of an optical filter where a substrate bearing the coating can be repeatedly cycled between room temperature and a temperature of at least 1000 .degree. C without significant degradation of its optical or mechanical properties.Type: GrantFiled: November 26, 1996Date of Patent: July 13, 1999Assignee: Deposition Sciences, Inc.Inventors: Byron A. Wood, II, William H. Howard
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Patent number: 5849162Abstract: A method for reactive sputter coating in a chamber in which large substrates to be coated are transported past one or more coating stations. The stations are comprised of at least one sputtering target and at least one adjacent plasma generator. In the practice of this invention the sputtering and reaction zones within the chamber are indistinguishable.Type: GrantFiled: April 25, 1995Date of Patent: December 15, 1998Assignee: Deposition Sciences, Inc.Inventors: Leroy Albert Bartolomei, Thomas Read, Craig Shevlin
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Patent number: 5714009Abstract: An apparatus and method for generating a plasma within a volume containing a mixture of gaseous species. To generate the plasma, at least one large area applicator, which is a part of this invention, is employed. At least one microwave generator introduces microwave power into the applicator by means of suitable waveguides and couplers.Type: GrantFiled: January 11, 1995Date of Patent: February 3, 1998Assignee: Deposition Sciences, Inc.Inventor: Norman L. Boling
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Patent number: 5616224Abstract: An apparatus for reducing the intensity and frequency of arcing in a reactive DC sputtering process when the process uses an arc-suppression system which interrupts or reverses the voltage applied to the sputtering target. A plasma having required properties is introduced into the vicinity of the sputtering target by means of a separate plasma applicator which operates independently of the target.Type: GrantFiled: May 9, 1995Date of Patent: April 1, 1997Assignee: Deposition Sciences, Inc.Inventor: Norman L. Boling
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Patent number: 5234769Abstract: A substantially transparent wear resistant member wherein a dielectric layer is coated on a support such as glass. Wear resistance is enhanced by reducing fine-scale surface roughness of the dielectric layer.Type: GrantFiled: April 16, 1992Date of Patent: August 10, 1993Assignee: Deposition Sciences, Inc.Inventor: Craig Shevlin
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Patent number: 5164858Abstract: An optical thin film filter for the spatial and spectral separation of two or more transmitting bands of radiant energy. For a two band filter the filter has a substrate substantially transparent to radiant energy in the transmitted bands. On one surface of said substrate is a multilayer interference coating that transmits both wavelength bands of interest. On the other surface of said substrate (or on the same surface) are two sets of non-overlapping butted, parallel stripes with one set being alternately interspersed with the other. The widths of said stripes are varied to provide for precisely defined regions of spatial and spectral delineation. One set of stripes is capable of transmitting one of the bands of interest and reflecting all others, while the second set of stripes is capable of transmitting at least one band different from the one band transmitted by said first set of stripes and reflecting all others.Type: GrantFiled: July 11, 1991Date of Patent: November 17, 1992Assignee: Deposition Sciences, Inc.Inventors: John A. Aguilera, Jr., William M. Robbins, Richard P. Shimshock, Leroy A. Bartolomei
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Patent number: 4879140Abstract: A method for producing pigment flakes in the shape of thin plates. A chamber is provided which is placed under vacuum and a gas, which is capable of forming a plasma upon its exposure to a plasma generating device, was fed to the interior of the chamber device. The plasma is created within the chamber which forms a film upon a surface within the chamber. The film is converted to flakes which are then removed from the interior of the chamber.Type: GrantFiled: November 21, 1988Date of Patent: November 7, 1989Assignee: Deposition Sciences, Inc.Inventors: Howard R. Gray, Richard P. Shimshock, Matthew E. Krisl