Patents Assigned to DESIGN NETWORK CO., LTD.
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Patent number: 11011403Abstract: An automatic clamping mechanism capable of automatically securing and releasing a wafer transport container to or from a manufacturing apparatus and having a small height dimension is provided at low cost. A wafer transport container is placed on a container placing table. A semiconductor wafer is loaded into the manufacturing apparatus main body from a wafer loading port while being placed on a container base part of the wafer transport container. An automatic clamping mechanism generates a press force component in a vertical direction at the wafer transport container and secures the wafer transport container to the container placing table by bringing claw parts of a plurality of clamping claws into contact with an inclined contact surface provided on a container lid part of the wafer transport container and pressing the inclined contact surface in a substantially horizontal direction.Type: GrantFiled: November 7, 2018Date of Patent: May 18, 2021Assignees: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY, DESIGN NETWORK CO., LTD.Inventors: Shiro Hara, Hitoshi Maekawa, Hiroyuki Nishihara, Koji Sagisawa
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Publication number: 20190164797Abstract: An automatic clamping mechanism capable of automatically securing and releasing a wafer transport container to or from a manufacturing apparatus and having a small height dimension is provided at low cost. A wafer transport container is placed on a container placing table. A semiconductor wafer is loaded into the manufacturing apparatus main body from a wafer loading port while being placed on a container base part of the wafer transport container. An automatic clamping mechanism generates a press force component in a vertical direction at the wafer transport container and secures the wafer transport container to the container placing table by bringing claw parts of a plurality of clamping claws into contact with an inclined contact surface provided on a container lid part of the wafer transport container and pressing the inclined contact surface in a substantially horizontal direction.Type: ApplicationFiled: November 7, 2018Publication date: May 30, 2019Applicants: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY, DESIGN NETWORK CO., LTD.Inventors: Shiro HARA, Hitoshi MAEKAWA, Hiroyuki NISHIHARA, Koji SAGISAWA
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Publication number: 20170098557Abstract: To provide a plasma device that all functions required for a plasma etching process are incorporated into a narrow space of a minimal fabrication manufacturing device. A plasma processing chamber for performing the plasma etching process on a semiconductor wafer is provided, and a micro-plasma supply section and a lower electrode that superimposes RF on supplied micro-plasma are provided in the plasma processing chamber. A wafer support device that supports the semiconductor wafer supports the semiconductor wafer in the plasma processing chamber during the etching process. The wafer support device is coupled to and supported by a drive section that is arranged outside the plasma processing chamber. The drive section makes the wafer support device repetitively move scanningly in the plasma processing chamber in parallel with a wafer processing surface during the etching process.Type: ApplicationFiled: March 10, 2015Publication date: April 6, 2017Applicants: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY, DESIGN NETWORK CO., LTD.Inventors: Yoshiki SHIMIZU, Shiro HARA, Hiroyuki TANAKA, Shizuka NAKANO, Hisato OGISO, Sommawan KHUMPUANG, Shinji FUTAGAWA, Hideaki YOSHIOKA, Takahiro FUKUDA, Yoshinori UCHIYAMA
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Patent number: 9254540Abstract: Mounting structure to allow a production line made up of movable manufacturing devices to be rearranged quickly, safely, and reliably. The mounting structure according to the present invention includes a fixing structure installed on a floor and a leg portion installed on a bottom plate of the movable manufacturing device. The fixing structure comprises a floor side positioning member and a floor side coupling member while the leg portion comprises a leg side positioning member and a leg side coupling member. The floor side positioning member and the leg side positioning member positions the movable manufacturing device accurately by fitting each other when the device is placed at the specified location of the fixing structure. The floor side coupling member and the leg side coupling member fixes the movable manufacturing device located on the fixing structure by coupling each other.Type: GrantFiled: May 30, 2014Date of Patent: February 9, 2016Assignees: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY, DESIGN NETWORK CO., LTD.Inventors: Shiro Hara, Shizuka Nakano, Hitoshi Maekawa, Shinji Futagawa, Takahiro Fukuda
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Publication number: 20140263938Abstract: Mounting structure to allow a production line made up of movable manufacturing devices to be rearranged quickly, safely, and reliably. The mounting structure according to the present invention includes a fixing structure installed on a floor and a leg portion installed on a bottom plate of the movable manufacturing device. The fixing structure comprises a floor side positioning member and a floor side coupling member while the leg portion comprises a leg side positioning member and a leg side coupling member. The floor side positioning member and the leg side positioning member positions the movable manufacturing device accurately by fitting each other when the device is placed at the specified location of the fixing structure. The floor side coupling member and the leg side coupling member fixes the movable manufacturing device located on the fixing structure by coupling each other.Type: ApplicationFiled: May 30, 2014Publication date: September 18, 2014Applicants: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY, DESIGN NETWORK CO., LTD.Inventors: Shiro HARA, Shizuka NAKANO, Hitoshi MAEKAWA, Shinji FUTAGAWA, Takahiro FUKUDA