Abstract: In order to so improve a microwave-pumped, high-pressure, gas-discharge laser, in particular, excimer laser, with an optical resonator, with a resonator gas volume arranged therein and extending along an optical axis thereof, with a microwave coupling structure enclosing the resonator gas volume within it and with a microwave generator connected to the microwave coupling structure, that a wall breakdown is substantially suppressed, it is proposed that a central area with an electric field intensity lying above a threshold value for a high-pressure gas discharge be disposed within the resonator gas volume in a transverse direction to the optical axis and be adjoined on both sides thereof by outer areas with a field intensity lying below the threshold value for the high-pressure gas discharge.
Type:
Grant
Filed:
November 14, 1988
Date of Patent:
September 4, 1990
Assignee:
Deutsche Forschungs -und Versuchsanstalt fuer Luft- und Raumfanrt eV.