Patents Assigned to Dexton, Inc.
  • Patent number: 4854623
    Abstract: A passive cassette robotic end effector, without any moving parts, used for directly handling individual wafer cassettes. A pair of opposing arms of the end effector, each a mirror image of the other, secures to an independent external robotic handler mounting plate. The end effector positions about either end of the wafer cassette under cassette wall reinforcement bars located on opposing sides of a wafer cassette. Cavities with ramped alignment walls on the upper inner portion of each arm of the end effector accommodates and engages the cassette wall reinforcement bars.
    Type: Grant
    Filed: January 29, 1988
    Date of Patent: August 8, 1989
    Assignee: Dexton, Inc.
    Inventor: James S. Molinaro