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Patents
Patents Assigned to Diamond Cubic Liquidation Trust
Patents Assigned to Diamond Cubic Liquidation Trust
Ultra-pure epitaxial silicon
Patent number:
4891201
Abstract:
Production of epitaxial silicon by thermal decomposition or hydrogen reduction of bromosilanes or iodosilane is disclosed.
Type:
Grant
Filed:
September 6, 1984
Date of Patent:
January 2, 1990
Assignee:
Diamond Cubic Liquidation Trust
Inventor:
John C. Schumacher