Abstract: An apparatus is provided for one-dimensional magnetic scanning or switching of a charged particle beam. The apparatus can be extended to two dimensions at the cost of added complexity.
Type:
Grant
Filed:
September 7, 2001
Date of Patent:
February 24, 2004
Assignee:
Diamond Semiconductor Group, LLC
Inventors:
Nicholas White, Edward Bell, Philip Harvey
Abstract: A fast dosimeter for ion implantation and other systems that produce charges or current to be measured. When a charge accumulator reaches a predetermined charge, a fixed charge is removed to reduce the accumulated charge. A counter records each charge removal. Between removals, an analog-to-digital converter measures the accumulator charge. The outputs from the counter and the analog-to-digital converter provide a continually updated value for the total accumulated charge, and by differentiation, current with respect to time.
Abstract: An apparatus is provided for one-dimensional magnetic scanning or switching of a charged particle beam. The apparatus can be extended to two dimensions at the cost of added complexity.
Type:
Application
Filed:
September 7, 2001
Publication date:
August 15, 2002
Applicant:
Diamond Semiconductor Group, LLC
Inventors:
Nicholas White, Edward Bell, Philip Harvey