Abstract: A method for making an actuator device includes providing a wafer comprising a layer of an electrically conductive material and forming a plurality of rotationally symmetrical dies in the electrically conductive material, each die including a plurality of radial tabs and complementarily sized radial recesses arranged in alternating fashion and at equal angular increments around the circumfery of the die. To maximize the use of available wafer space, the dies are arranged in a pattern on the wafer in which each die is rotated relative to adjacent dies through an angle of 360 degrees divided by twice the number of tabs or recesses on the die and, except for dies located at an outer periphery of the wafer, each die is disposed in edge-to-edge near abutment with an adjacent die and each tab of each die is nested within a complementary recess of an adjacent die.

Abstract: A device may have an outer frame, a platform, and a plurality of actuators configured to move the platform with respect to the outer frame. Each of the actuators may have a movable frame and a fixed frame. A motion control mechanism may be configured to permit movement of the platform in a desired direction with respect to the outer frame and inhibit rotation of the platform with respect to the outer frame.

Abstract: A method for making an actuator device includes forming a substantially planar structure, including an outer frame with a latch foot, a fixed frame coupled to the outer frame, a latch mass coupled to the fixed frame, a latch block coupled to the latch mass by a latch block flexure, a moveable frame coupled to the outer frame, and an actuator incorporating a plurality of interdigitated teeth alternately attached to the fixed and moving frames. For operation, the latch mass is rotated downward until an upper surface of the latch block is disposed below and held in latching contact with a lower surface of the latch foot by the latch block flexure.

Abstract: A method for aligning an actuator device relative to an adjacent component, such as a rear cover of an actuator module or a stationary lens, includes disposing a plurality of radially extending tabs around an outer periphery of the actuator device, disposing a corresponding plurality of pairs of raised mounting features on a front surface of the adjacent component, each pair defining a slot having sidewalls that are complementary in configuration to respective sidewalls of corresponding ones of the tabs, and inserting respective ones of the tabs into corresponding ones of the slots.

Abstract: A method for making an actuator includes forming a substantially planar actuator device of an electrically conductive material, the device incorporating an outer frame, a fixed frame attached to the outer frame, a moveable frame disposed parallel to the fixed frame, a motion control flexure coupling the moveable frame to the outer frame for coplanar, rectilinear movement relative to the outer frame and the fixed frame, an actuator incorporating a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moveable frame, moving the moveable frame to a deployed position that is coplanar with, parallel to and spaced a selected distance apart from the fixed frame, and fixing the moveable frame at the deployed position for substantially rectilinear, perpendicular movement relative to the fixed frame.

Abstract: A device may comprise a flexure formed of a first semiconductor material. A first trench may be formed in the flexure. The first trench may separate the first semiconductor material into a first portion and a second portion thereof. An oxide layer may be formed in the first trench. The oxide layer may extend over a top portion of the first semiconductor material. A second semiconductor material may be formed on the oxide layer. The first trench and the oxide layer may cooperate to electrically isolate the first portion and the second portion from one another.

Abstract: A device may comprise an upper module cover, a lower module cover, an outer frame, and an actuator having a movable frame. The movable frame may be at least partially disposed intermediate the upper module cover and the lower module cover. A hinge flexure may interconnect the outer frame and the movable frame such that the movable frame is rotatable with respect to the outer frame. The upper module cover and/or the lower module cover may be adapted to limit a movement of the movable frame.

Abstract: A device can have an outer frame and an actuator. The actuator can have a movable frame and a fixed frame. At least one torsional flexure and at least one hinge flexure can cooperate to provide comparatively high lateral stiffness between the outer frame and the movable frame and can cooperate to provide comparatively low rotational stiffness between the outer frame and the movable frame.

Abstract: An actuator that operates by electrostatic attraction and repulsion and can have fixed and moving electrodes is disclosed for one or more embodiments. The fixed and moving electrodes can be inclined relative to each other at an acute angle. The actuator can be radially symmetric and mirrored about the moving electrode. The moving electrode can have a central aperture over which is placed an optical element such as a lens. The optical element can be part of an optical train that permits the focus of an electronic camera to be modified by changing the displacement of the lens along the optical axis of the camera.

Abstract: A method and system for hiding objectionable frames during autofocusing are disclosed. A personal electronic device such as a cameral telephone can have two cameras that have overlapping fields of view. One camera can provide imaging. The other camera can facilitate autofocusing in a manner wherein images produced thereby are not viewed by a user. Because the autofocus frames are hidden, the user is not distracted or annoying thereby.

Abstract: A silicon MEMS device can have at least one solder contact formed thereupon. The silicon MEMS device can be configured to be mounted to a circuit board via the solder contact(s). The silicon MEMS device can be configured to be electrically connected to the circuit board via the solder contact(s).

Abstract: An electronic device may have a MEMS device formed of a first conductive material. A trench may be formed in the MEMS device. A layer of non-conductive material may be formed in the trench. A second conductive material may be formed upon the non-conductive material.

Abstract: A MEMS device can include an actuator, a base formed from a substrate, and a plurality of memory cells integrated with the base. At least a portion of the base can be configured to move in response to the actuator. A miniature camera can include a base comprising a frame, a stage, and a plurality of flexures configured to connect the stage with the frame. The flexures can be adapted to bend to permit the stage to move relative to the frame. The camera can include a plurality of memory cells integrated with the base, a lens mount secured to the stage, a lens barrel secured to the lens mount, an image sensor, and an actuator adapted to move the stage relative to the frame and the image sensor.

Abstract: A method for aligning an actuator device relative to an adjacent component, such as a rear cover of an actuator module or a stationary lens, includes disposing a plurality of radially extending tabs around an outer periphery of the actuator device, disposing a corresponding plurality of pairs of raised mounting features on a front surface of the adjacent component, each pair defining a slot having sidewalls that are complementary in configuration to respective sidewalls of corresponding ones of the tabs, and inserting respective ones of the tabs into corresponding ones of the slots.

Abstract: Techniques are disclosed for systems and methods to provide concomitant mechanical motion inhibition and electrical distribution for actuator modules, such as microelectromechanical systems (MEMS) based optical actuators adapted to move and/or orient one or more lenses and/or optical devices of a camera module. A mechanical motion inhibition and electrical distribution system may include one or more flexible snubber structures disposed substantially adjacent a MEMS structure and between the MEMS structure and another component of a camera module. Each flexible snubber structure may be implemented with one or more electrical traces, flexible films, snubber films, and/or mechanical stabilizers adapted to route electrical signals to or from the MEMS structure and/or to inhibit mechanical motion of at least a portion of the MEMS structure.

Abstract: In one embodiment, an actuator includes a moving frame coupled to a fixed frame by a plurality of elongated parallel motion flexures for generally parallel motion relative to the fixed frame and between an as-fabricated position and a deployed position. The flexures are disposed at a first angle relative to a line extending perpendicularly to both the moving frame and the fixed frame when the moving frame is disposed in the as-fabricated position, and at a second angle relative to that same line when the moving frame is disposed in the deployed position, Arcuate movement of the first frame relative to the second frame is controlled by constraining the first angle to a value of less than about half of the sum of the first and second angles.

Abstract: A camera module includes an actuator that is coupled to one or more lenses of an optical train configured to move relative to an image sensor to provide alignment, zoom and/or autofocus control. The actuator is configured to position one or more, e.g., three, lenses of the optical train by applying one or more bias voltages respectively between one or more pairs of actuator components. A processor uses measured capacitances of the pairs of actuator components and/or the bias voltages thereof to calculate an acceleration or force acting on the camera module and to provide information for the actuator to align the optical train along the optical path in accordance with the information.

Abstract: A flexure system for miniature camera and the like is disclosed. The flexure system can include a frame and a stage that is configured to move with respect to the frame. One or more flexures can interconnect the frame and the stage. Each flexure can have one or more film hinges formed thereon. The film hinges can be widely spaced and/or extended in length so as to substantially mitigate undesirable pitching of the stage.

Abstract: A method for focusing a miniature camera includes providing a current through a coil, moving a lens of a camera based on the current to adjust a focus of the camera, and limiting movement of the lens along an optical path of the camera.

Abstract: A method for making an actuator includes forming, e.g., using photolithography techniques, a substantially planar actuator device of an electrically conductive material, e.g., a semiconductor, to include an outer frame, a fixed frame coupled to the outer frame for rotational movement relative thereto, a moveable frame coupled to the outer frame for rotational movement relative thereto, and an actuator incorporating a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moveable frame. The fixed frame is then rotated to a deployed position relative to the outer frame such that the fixed portion of the actuator teeth is disposed at a selected angle relative to the moving portion of the actuator teeth, and the position of the fixed frame relative to the outer frame is then fixed at the deployed position.