Abstract: The present disclosure generally relates to a system and method for multiple beam laser deposition of thin films wherein separate laser beams are used to ablate material from separate targets for concurrent deposition on a common substrate. The targets may include, but not limited to polymers, organics, inorganics, nanocrystals, solutions, or mixtures of materials. A target may be disposed on a tiltable mount to adjust the direction of the ablation plumes. Multiple ablation modes may be concurrently employed at the various targets, including, but not limited to pulsed laser, MAPLE, IR-MAPLE and other modes. The system may include a camera and processor for plume axis determination and feedback control of the plume axis by controlling a tilt of a target holder. Maple target loading sequences and liquid states are described. Fluorescent image monitoring is described.

Abstract: A method for open-air pulsed laser deposition by providing a target and a substrate, configuring a laser directed to the target, reducing the pressure in the zone between the target and substrate by providing a suction having an opening proximal to the target. Optionally, shielding the zone between the target and substrate from ambient oxygen by flowing an inert gas from outside the zone. The method may accommodate very large substrates and multiple targets and multiple laser beams. The target may be tilted or remotely tilted. Matrix assisted pulsed laser deposition may be utilized.

Abstract: Briefly, the present disclosure relates to a nanocomposite thermoelectric energy converter comprising a composite thin film inorganic semiconductor having carbonized polymer nano-clusters and the net of polymer nano-fibers included within. The carbonized polymer nano-clusters and nano-fibers improve the thermoelectric figure of merit ZT by increasing electrical conductivity and decreasing thermal conductivity. The converter may be fabricated by a dual beam pulsed laser deposition process. A first laser beam evaporates a target comprising the materials of the inorganic semiconductor. A second laser beam evaporates the polymer using a matrix assisted target for depositing the polymer concurrently with the semiconductor deposition to yield the composite film. The lasers may be separately controlled to determine the resulting composition. The converter may be deposited on rigid or flexible substrates for a wide range of applications.