Patents Assigned to Dimatix, Inc.
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Patent number: 11904610Abstract: A fluid ejector includes a nozzle layer, a body, an actuator and a membrane. The body includes a pumping chamber, a return channel, and a first passage fluidically connecting the pumping chamber to an entrance of the nozzle. A second passage fluidically connects the entrance of the nozzle to the return channel. The actuator is configured to cause fluid to flow out of the pumping chamber such that actuation of the actuator causes fluid to be ejected from the nozzle. The membrane is formed across and partially blocks at least one of the first passage, the second passage or the entrance of the nozzle. The membrane has at least one hole therethrough such that in operation of the fluid ejector fluid flows through the at least one hole in the membrane.Type: GrantFiled: April 28, 2021Date of Patent: February 20, 2024Assignee: FUJIFILM Dimatix, Inc.Inventors: Christoph Menzel, Darren Imai
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Patent number: 11865837Abstract: A fluid ejection apparatus includes a plurality of fluid ejectors. Each fluid ejector includes a pumping chamber, and an actuator configured to cause fluid to be ejected from the pumping chamber. The fluid ejection apparatus includes a feed channel fluidically connected to each pumping chamber; and at least one compliant structure formed in a surface of the feed channel. The at least one compliant structure has a lower compliance than the surface of the feed channel.Type: GrantFiled: October 13, 2022Date of Patent: January 9, 2024Assignee: FUJIFILM Dimatix, Inc.Inventors: Christoph Menzel, Kevin von Essen, Steven H. Barss, Mats G. Ottosson, Darren T. Imai
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Patent number: 11794475Abstract: An apparatus includes a reservoir and a printhead. The printhead includes a support structure including a deformable portion defining at least a top surface of a pumping chamber, a flow path extending from the reservoir to the pumping chamber to transfer fluid from the reservoir to the pumping chamber, and an actuator disposed on the deformable portion of the support structure. A trench is defined in a top surface of the actuator. Application of a voltage to the actuator causes the actuator to deform along the trench, thereby causing deformation of the deformable portion of the support structure to eject a drop of fluid from the pumping chamber.Type: GrantFiled: November 1, 2022Date of Patent: October 24, 2023Assignee: FUJIFILM Dimatix, Inc.Inventors: Christoph Menzel, Shinya Sugimoto, Mats G. Ottoson, Wayne Liu
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Patent number: 11779957Abstract: Micromachined ultrasonic transducer (MUT) arrays capable of multiple resonant modes and techniques for operating them are described, for example to achieve both high frequency and low frequency operation in a same device. In embodiments, various sizes of piezoelectric membranes are fabricated for tuning resonance frequency across the membranes. The variously sized piezoelectric membranes are gradually transitioned across a length of the substrate to mitigate destructive interference between membranes oscillating in different modes and frequencies.Type: GrantFiled: January 27, 2020Date of Patent: October 10, 2023Assignee: FUJIFILM DIMATIX, INC.Inventor: Arman Hajati
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Patent number: 11571895Abstract: Techniques are provided for making a funnel-shaped nozzle in a substrate. The process can include forming a first opening having a first width in a top layer of a substrate, forming a patterned layer of photoresist on the top surface of the substrate, the patterned layer of photoresist including a second opening, the second opening having a second width larger than the first width, reflowing the patterned layer of photoresist to form curved side surfaces terminating on the top surface of the substrate, etching a second layer of the substrate through the first opening in the top layer of the substrate to form a straight-walled recess, the straight-walled recess having the first width and a side surface substantially perpendicular to the top surface of the semiconductor substrate.Type: GrantFiled: October 21, 2020Date of Patent: February 7, 2023Assignee: FUJIFILM Dimatix, Inc.Inventors: Gregory DeBrabander, Mark Nepomnishy
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Patent number: 11498330Abstract: A fluid ejection apparatus includes a plurality of fluid ejectors. Each fluid ejector includes a pumping chamber, and an actuator configured to cause fluid to be ejected from the pumping chamber. The fluid ejection apparatus includes a feed channel fluidically connected to each pumping chamber; and at least one compliant structure formed in a surface of the feed channel. The at least one compliant structure has a lower compliance than the surface of the feed channel.Type: GrantFiled: February 8, 2021Date of Patent: November 15, 2022Assignee: FUJIFILM Dimatix, Inc.Inventors: Christoph Menzel, Kevin von Essen, Steven H. Barss, Mats G. Ottosson, Darren T. Imai
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Patent number: 11498334Abstract: An apparatus includes a reservoir and a printhead. The printhead includes a support structure including a deformable portion defining at least a top surface of a pumping chamber, a flow path extending from the reservoir to the pumping chamber to transfer fluid from the reservoir to the pumping chamber, and an actuator disposed on the deformable portion of the support structure. A trench is defined in a top surface of the actuator. Application of a voltage to the actuator causes the actuator to deform along the trench, thereby causing deformation of the deformable portion of the support structure to eject a drop of fluid from the pumping chamber.Type: GrantFiled: March 8, 2021Date of Patent: November 15, 2022Assignee: FUJIFILM Dimatix, Inc.Inventors: Christoph Menzel, Shinya Sugimoto, Mats G. Ottoson, Wayne Liu
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Patent number: 11413869Abstract: A fluid ejector includes a fluid ejection module having a substrate and a layer separate from the substrate. The substrate includes a plurality of fluid ejection elements arranged in a matrix, each fluid ejection element configured to cause a fluid to be ejected from a nozzle. The layer separate from the substrate includes a plurality of electrical connections, each electrical connection adjacent to a corresponding fluid ejection element.Type: GrantFiled: May 4, 2020Date of Patent: August 16, 2022Assignee: FUJIFILM Dimatix, Inc.Inventors: Andreas Bibl, Kevin von Essen, Paul A. Hoisington
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Publication number: 20210187949Abstract: An apparatus includes a reservoir and a printhead. The printhead includes a support structure including a deformable portion defining at least a top surface of a pumping chamber, a flow path extending from the reservoir to the pumping chamber to transfer fluid from the reservoir to the pumping chamber, and an actuator disposed on the deformable portion of the support structure. A trench is defined in a top surface of the actuator. Application of a voltage to the actuator causes the actuator to deform along the trench, thereby causing deformation of the deformable portion of the support structure to eject a drop of fluid from the pumping chamber.Type: ApplicationFiled: March 8, 2021Publication date: June 24, 2021Applicant: FUJIFILM Dimatix, Inc.Inventors: Christoph Menzel, Shinya Sugimoto, Mats G. Ottoson, Wayne Liu
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Publication number: 20210154994Abstract: A fluid ejection apparatus includes a plurality of fluid ejectors. Each fluid ejector includes a pumping chamber, and an actuator configured to cause fluid to be ejected from the pumping chamber. The fluid ejection apparatus includes a feed channel fluidically connected to each pumping chamber; and at least one compliant structure formed in a surface of the feed channel. The at least one compliant structure has a lower compliance than the surface of the feed channel.Type: ApplicationFiled: February 8, 2021Publication date: May 27, 2021Applicant: FUJIFILM Dimatix, Inc.Inventors: Christoph Menzel, Kevin von Essen, Steven H. Barss, Mats G. Ottosson, Darren T. Imai
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Patent number: 11014359Abstract: A system and apparatus includes a nozzle formed on a first surface of a substrate, and a fluid passage in the substrate and fluidically connected to the nozzle, the fluid passage being nonlinear along at least a portion of its length and having a cross section that varies along its length, wherein the fluid passage has a width near a second surface of the substrate that is different from a width near a bottom of the fluid passage. A system and apparatus includes a nozzle formed on a surface of a substrate, and a fluid passage defined in the substrate and fluidically connected to the nozzle, the fluid passage having a first portion that substantially lies on a first plane, a second portion that substantially lies on a second plane different from the first plane, and a connecting passage fluidically connecting the first portion to the second portion.Type: GrantFiled: September 20, 2019Date of Patent: May 25, 2021Assignee: FUJIFILM Dimatix, Inc.Inventors: James Leslie Cole-Henry, Andrew Beech Johns, Robert L. Wells, Jr.
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Patent number: 11001059Abstract: A fluid ejector includes a nozzle layer, a body, an actuator and a membrane. The body includes a pumping chamber, a return channel, and a first passage fluidically connecting the pumping chamber to an entrance of the nozzle. A second passage fluidically connects the entrance of the nozzle to the return channel. The actuator is configured to cause fluid to flow out of the pumping chamber such that actuation of the actuator causes fluid to be ejected from the nozzle. The membrane is formed across and partially blocks at least one of the first passage, the second passage or the entrance of the nozzle. The membrane has at least one hole therethrough such that in operation of the fluid ejector fluid flows through the at least one hole in the membrane.Type: GrantFiled: April 25, 2019Date of Patent: May 11, 2021Assignee: FUJIFILM Dimatix, Inc.Inventors: Christoph Menzel, Darren T. Imai
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Patent number: 10940688Abstract: An apparatus includes a reservoir and a printhead. The printhead includes a support structure including a deformable portion defining at least a top surface of a pumping chamber, a flow path extending from the reservoir to the pumping chamber to transfer fluid from the reservoir to the pumping chamber, and an actuator disposed on the deformable portion of the support structure. A trench is defined in a top surface of the actuator. Application of a voltage to the actuator causes the actuator to deform along the trench, thereby causing deformation of the deformable portion of the support structure to eject a drop of fluid from the pumping chamber.Type: GrantFiled: September 4, 2019Date of Patent: March 9, 2021Assignee: FUJIFILM Dimatix, Inc.Inventors: Christoph Menzel, Shinya Sugimoto, Mats G. Ottoson, Wayne Liu
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Patent number: 10913264Abstract: A fluid ejection apparatus includes a plurality of fluid ejectors. Each fluid ejector includes a pumping chamber, and an actuator configured to cause fluid to be ejected from the pumping chamber. The fluid ejection apparatus includes a feed channel fluidically connected to each pumping chamber; and at least one compliant structure formed in a surface of the feed channel. The at least one compliant structure has a lower compliance than the surface of the feed channel.Type: GrantFiled: June 20, 2018Date of Patent: February 9, 2021Assignee: FUJIFILM Dimatix, Inc.Inventors: Christoph Menzel, Kevin von Essen, Steven H. Barss, Mats G. Ottosson, Darren T. Imai
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Publication number: 20210031521Abstract: Techniques are provided for making a funnel-shaped nozzle in a substrate. The process can include forming a first opening having a first width in a top layer of a substrate, forming a patterned layer of photoresist on the top surface of the substrate, the patterned layer of photoresist including a second opening, the second opening having a second width larger than the first width, reflowing the patterned layer of photoresist to form curved side surfaces terminating on the top surface of the substrate, etching a second layer of the substrate through the first opening in the top layer of the substrate to form a straight-walled recess, the straight-walled recess having the first width and a side surface substantially perpendicular to the top surface of the semiconductor substrate.Type: ApplicationFiled: October 21, 2020Publication date: February 4, 2021Applicant: FUJIFILM Dimatix, Inc.Inventors: Gregory DeBrabander, Mark Nepomnishy
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Patent number: 10850518Abstract: Techniques are provided for making a funnel-shaped nozzle in a substrate. The process can include forming a first opening having a first width in a top layer of a substrate, forming a patterned layer of photoresist on the top surface of the substrate, the patterned layer of photoresist including a second opening, the second opening having a second width larger than the first width, reflowing the patterned layer of photoresist to form curved side surfaces terminating on the top surface of the substrate, etching a second layer of the substrate through the first opening in the top layer of the substrate to form a straight-walled recess, the straight-walled recess having the first width and a side surface substantially perpendicular to the top surface of the semiconductor substrate.Type: GrantFiled: November 8, 2019Date of Patent: December 1, 2020Assignee: FUJIFILM Dimatix, Inc.Inventors: Gregory DeBrabander, Mark Nepomnishy
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Patent number: 10766258Abstract: A piezoelectric device and method of manufacturing the same and an inkjet head are described. In one embodiment, the inkjet print head comprises a plurality of jets, wherein each of the plurality of jets comprises a nozzle, a pressure chamber connected with the nozzle, a piezoelectric body coupled to the pressure chamber, and an electrode coupled to the piezoelectric body to cause displacement of the piezoelectric body to apply pressure to the pressure chamber in response to a voltage applied to the electrode; and wherein electrodes of two or more of the plurality of jets have different sizes to cause their associated piezoelectric bodies to have a uniform displacement amount when the voltage is applied to the electrodes.Type: GrantFiled: September 17, 2019Date of Patent: September 8, 2020Assignee: FUJIFILM DIMATIX, INC.Inventors: Yoshikazu Hishinuma, Shinya Sugimoto, Youming Li, Christoph Menzel, Mats G. Ottoson, Darren Imai
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Patent number: 10696047Abstract: A fluid ejector includes a fluid ejection module having a substrate and a layer separate from the substrate. The substrate includes a plurality of fluid ejection elements arranged in a matrix, each fluid ejection element configured to cause a fluid to be ejected from a nozzle. The layer separate from the substrate includes a plurality of electrical connections, each electrical connection adjacent to a corresponding fluid ejection element.Type: GrantFiled: October 2, 2017Date of Patent: June 30, 2020Assignee: FUJIFILM Dimatix, Inc.Inventors: Andreas Bibl, Kevin von Essen, Paul A. Hoisington
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Patent number: 10611144Abstract: A fluid ejection apparatus includes a fluid ejector comprising a pumping chamber, an ejection nozzle coupled to the pumping chamber, and an actuator configured to cause fluid to be ejected from the pumping chamber through the ejection nozzle. The fluid ejection apparatus includes a first compliant assembly formed in a surface of an inlet feed channel, the inlet feed channel fluidically connected to a fluid inlet of the pumping chamber; and a second compliant assembly formed in a surface of an outlet feed channel, the outlet feed channel fluidically connected to a fluid outlet of the pumping chamber. A compliance of the first compliant assembly is different from a compliance of the second compliant assembly.Type: GrantFiled: June 5, 2018Date of Patent: April 7, 2020Assignee: FUJIFILM Dimatix, Inc.Inventors: Matt Giere, Christoph Menzel, Daniel W. Barnett
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Publication number: 20200094551Abstract: A system and apparatus includes a nozzle formed on a first surface of a substrate, and a fluid passage in the substrate and fluidically connected to the nozzle, the fluid passage being nonlinear along at least a portion of its length and having a cross section that varies along its length, wherein the fluid passage has a width near a second surface of the substrate that is different from a width near a bottom of the fluid passage. A system and apparatus includes a nozzle formed on a surface of a substrate, and a fluid passage defined in the substrate and fluidically connected to the nozzle, the fluid passage having a first portion that substantially lies on a first plane, a second portion that substantially lies on a second plane different from the first plane, and a connecting passage fluidically connecting the first portion to the second portion.Type: ApplicationFiled: September 20, 2019Publication date: March 26, 2020Applicant: FUJIFILM Dimatix, Inc.Inventors: James Leslie Cole-Henry, Andrew Beech Johns, Robert L. Wells, JR.