Abstract: Described are a method and apparatus for high-speed phase shifting of an optical beam. A transparent plate having regions of different optical thickness is illuminated by an optical beam along a path of incidence that extends through the regions. The transparent plate can be moved or the optical beam can be steered to generate the path of incidence. The optical beam exiting the transparent plate has an instantaneous phase value according to the region in which the optical beam is incident. Advantageously, the phase values are repeatable and stable regardless of the location of incidence of the optical beam within the respective regions, and phase changes at high modulation rates are possible. The method and apparatus can be used to modulate a phase difference of a pair of coherent optical beams such as in an interferometric fringe projection system.

Abstract: An aspect of the invention relates to a calibration standard for a three-dimensional measurement system and various calibration methods and techniques. The calibration standard typically includes a calibration standard surface and a plurality of optical targets. The optical targets being are affixed to the calibration standard surface and define a three-dimensional distribution of optical reference points. The optical targets can be serve as active, passive calibration targets, or combinations of both. In one embodiment, the optical targets include an optical source and a diffusing target, and each of the optical sources are configured to illuminate the respective diffusing target. The optical targets can be removably affixed to the calibration standard surface.