Abstract: A titanium-nickel-palladium solderable metal system for silicon power semiconductor devices (10), which may be used for one or both of the anode (20) or cathode (30). The metal system includes an outer layer of palladium (40,70), an intermediate layer of nickel (50,80), and an inner layer of titanium (60,90). For certain applications, the nickel may be alloyed with vanadium. The metal system may be deposited on bare silicon (100) or on one or more additional layers of metal (110) which may include aluminum, aluminum having approximately 1% silicon, or metal silicide. The use of palladium, rather than gold or silver, reduces cost, corrosion, and scratching.

Abstract: A high-efficiency power semiconductor rectifier device (10) comprising a ?P++ layer (12), a P-body (14), an N-drift region (16), an N+ substrate (18), an anode (20), and a cathode (22). The method of fabricating the device (10) comprises the steps of depositing the N-drift region (16) on the N+ substrate (18), implanting boron into the N-drift region (16) to create a P-body region (14), forming a layer of titanium silicide (56) on the P-body region (14), and concentrating a portion of the implanted boron at the interface region between the layer of titanium silicide (56) and the P-body region (14) to create the ?P++ layer (12) of supersaturated P-doped silicon.

Abstract: A rectifier device (10) comprising a multi-layer epitaxial film (12) and a rectifier and a transistor manufactured in the film (12), wherein the transistor is oriented vertically relative to the plane of the rectifier. The rectifier and transistor are separated by a transition zone of inverted bias. The rectifier is a Schottky barrier rectifier, and the transistor is a JFET. More specifically, the device (1) comprises the film (12), a trench (16), a first region (18) associated with an upper portion of the trench (16), and second region (20) associated with a lower portion. The interface between the p+ material of the second region (20) and the n material of the film (12) creates a p+/n junction. The device (10) has use in high frequency, low-loss power circuit applications in which high switching speed and low forward voltage drop are desirable.