Patents Assigned to Discreet Industries Corporation
  • Wafer latch with a ball bearing assembly
    Patent number: 6536755
    Abstract: A latch for securing a wafer to a clamp plate. The latch may include a bearing that couples a wheel to a horizontal shaft. The horizontal shaft is adapted to rotate relative to the clamp ring so that the wheel secures the wafer. The bearing minimizes the amount of particles generated by the moving components of the latch that may contaminant the wafer.
    Type: Grant
    Filed: July 13, 2001
    Date of Patent: March 25, 2003
    Assignee: Discreet Industries Corporation
    Inventors: Ovadia Meron, Dmitriy Genkin
  • Wafer latch with a ball bearing assembly
    Patent number: 6299153
    Abstract: A latch for securing a wafer to a clamp plate. The latch may include a bearing that couples a wheel to a horizontal shaft. The horizontal shaft is adapted to rotate relative to the clamp ring so that the wheel secures the wafer. The bearing minimizes the amount of particles generated by the moving components of the latch that may contaminant the wafer.
    Type: Grant
    Filed: July 26, 1999
    Date of Patent: October 9, 2001
    Assignee: Discreet Industries Corporation
    Inventors: Ovadia Meron, Dmitriy Genkin