Patents Assigned to Display Inspection Systems, Inc.
  • Differential phase contrast inspection system with multiple detectors
    Patent number: 5638175
    Abstract: A high speed, high sensitivity inspection system (10) is provided, which is substantially impervious to external factors such as vibration. The inspection system is an optical system which employs phase contrast interferometry to achieve the desired results. The systems makes use of a "black beam" at the optical axis of the system, and uses at least two detectors to determine the intensity of the light beam after passing through a work piece.
    Type: Grant
    Filed: September 19, 1995
    Date of Patent: June 10, 1997
    Assignee: Display Inspection Systems, Inc.
    Inventors: Andrei Brunfeld, Gregory Toker, Zvi Yaniv, Ilan Laver
  • Differential phase contrast inspection system
    Patent number: 5459576
    Abstract: A high speed, high sensitivity inspection system (10) is provided, which is substantially impervious to external factors such as vibration. The inspection system is an optical system which employs phase contrast interferometry to achieve the desired results.
    Type: Grant
    Filed: January 24, 1994
    Date of Patent: October 17, 1995
    Assignee: Display Inspection Systems, Inc.
    Inventors: Andrei Brunfeld, Gregory Toker, Zvi Yaniv, Ilan Laver