Abstract: An arrangement in which an angular prism is formed with two triangular part prisms which are connected to one another by a layer having properties splitting at least one laser beam into part beams. The two part prisms have two identical acute angles ?. The laser beam is directed onto an outward-facing surface of one of the two part prisms. The at least one laser beam is split into two part beams by the reflection of a part of the radiation by the layer and transmission of a further part of the radiation through the layer. The part beams are each incident on an outward-facing surface, are reflected there and exit from the part prisms and are incident on at least one optical element and are aligned such that they interfere with one another in a region of a component in which a structural pattern is intended to be formed.
Type:
Application
Filed:
November 7, 2022
Publication date:
March 9, 2023
Applicants:
SURFUNCTION GmbH, DLIP UG
Inventors:
Sascha TEUTOBURG-WEISS, Andrés F. LASAGNI
Abstract: An optical device, its use, and a method for interference structuring of a sample. A laser emits a laser beam that is split into at least two partial beams by a beam splitter. A first cylindrical lens and a second cylindrical lens for refracting the partial beams into an interference area are arranged in the beam path. The partial beams interfere in such a way that a structure having linear structure elements may be formed in a structural region of the sample. The cylinder axis of the first cylindrical lens is aligned parallel to the cylinder axis of the second cylindrical lens.