Abstract: An optical position measuring system for determining the relative position of a first object which can be moved with respect to a second object along a measuring direction includes at least one periodic measuring graduation, which is connected to the first object and a scanning unit which is connected with the second object. The scanning unit includes a light source emitting beams of light, at least one scanning graduation and a detector arrangement in a detector plane.
Type:
Grant
Filed:
February 2, 2000
Date of Patent:
April 22, 2003
Assignee:
Dr. Johannes Hiedenhein GmbH
Inventors:
Michael Hermann, Walter Huber, Wolfgang Holzapfel, Volker Höfer