Patents Assigned to DUKSAN TECHOPIA CO., LTD.
  • AMINO-SILANE COMPOUND AND COMPOSITION FOR THE SILICON-CONTAINING THIN FILM COMPRISING THE SAME
    Publication number: 20230094481
    Abstract: The present invention relates to an aminosilane compound and a composition for a silicon-containing thin film comprising the same, and more particularly, to an aminosilane compound and a composition for a silicon-containing thin film comprising the same having suitable properties that can be used as a precursor for forming a silicon-containing thin film and capable of replacing chlorosilanes.
    Type: Application
    Filed: July 7, 2020
    Publication date: March 30, 2023
    Applicant: DUKSAN TECHOPIA CO., LTD.
    Inventors: Sang Woong YOON, Han Yong YANG, Hyoung Nam KIM, Gun Hyung JO
  • SiC PRECURSOR COMPOUND AND THIN FILM FORMING METHOD USING THE SAME
    Publication number: 20210024550
    Abstract: Provided is a SiC precursor for performing SiOCN thin film deposition and a method of forming SiOCN thin film, the method of forming thin film containing a silicon according to the subject matter is performed on a low temperature process that does not require a catalyst, and film deposition rate and process efficiency are excellent according to the subject matter.
    Type: Application
    Filed: March 5, 2019
    Publication date: January 28, 2021
    Applicant: DUKSAN TECHOPIA CO., LTD.
    Inventors: Ja Yeon KIM, Hyoung Nam KIM, Seung Bae PARK, Sangwoong YOON, Soojin LEE