Abstract: A sputter ion pump including an evacuateable envelope having a chamber, first and second cathodes and an anode disposed in the chamber. The anode can have an outer layer of a non-evaporable getter (NEG) material so as to permit NEG pumping of gases by the anode. In another aspect of the invention, the anode can be formed with spaced-apart first and second sheet portions disposed in juxtaposition to each other and having a plurality of holes extending through the sheets for forming a plurality of anode cells.
Type:
Grant
Filed:
November 2, 2009
Date of Patent:
May 14, 2013
Assignee:
Duniway Stockroom Corp.
Inventors:
Sherman Lloyd Rutherford, Jeffrey Richard Winkler
Abstract: A sputter ion pump including an evacuateable envelope having a chamber, first and second cathodes and an anode disposed in the chamber. The anode can have an outer layer of a non-evaporable getter (NEG) material so as to permit NEG pumping of gases by the anode. In another aspect of the invention, the anode can be formed with spaced-apart first and second sheet portions disposed in juxtaposition to each other and having a plurality of holes extending through the sheets for forming a plurality of anode cells.
Type:
Application
Filed:
November 2, 2009
Publication date:
May 5, 2011
Applicant:
DUNIWAY STOCKROOM CORP.
Inventors:
Sherman Lloyd RUTHERFORD, Jeffrey Richard WINKLER
Abstract: There is described a vacuum gauge in which an anode grid defines an ionization volume directly into which electrons are injected where they collide with gas molecules and atoms to form ions. A collector electrode is mounted within the ionization volume.
Type:
Application
Filed:
September 13, 2001
Publication date:
March 27, 2003
Applicant:
Duniway Stockroom Corp.
Inventors:
Sherman L. Rutherford, Ronald M. Paitich, Fredrick P. Brechtel, Robert J. Espinosa
Abstract: A sputter ion pump including an anode assembly comprising a plurality of hollow anode cells and cathode surfaces having open spirals disposed at each end of said anode cells.