Patents Assigned to Dupont AurProducts NanoMaterials Limited Company
  • Publication number: 20090311947
    Abstract: The present invention provides a polishing composition used in a polishing process of a silicon wafer, which has an improved smoothness and is environment-friendly. The polishing composition for the silicon wafer of the present invention comprises a metal oxide, an alkaline substance and water, wherein the alkaline substance is guanidines. Another polishing composition for a silicon wafer of the present invention comprises an alkaline substance and water, wherein the alkaline substance is guanidines. These polishing compositions may further comprise a chelating agent. The metal oxide is preferably a cerium oxide or a silicon oxide. The present invention encompasses a polishing method using the above polishing composition and a kit for the above polishing composition.
    Type: Application
    Filed: October 18, 2006
    Publication date: December 17, 2009
    Applicant: Dupont AurProducts NanoMaterials Limited Company
    Inventors: Naoyuki Iwata, Isao Nagashima