Patents Assigned to Duratek, Inc.
  • Publication number: 20020005253
    Abstract: A modular device of tubular plasma source mainly includes at least two tubular antennae, one RF power supply and one reference potential. The tubular antennae are arranged side by side for inducing plasma. Each tubular antenna includes an induction coil being a spiral spring shape, and a dielectric sleeve having a hollow through hole for putting in the induction coil. The RF power supply connects with the induction coil in parallel or in series, the reference potential refers to the RF power supply and connects with the induction coil.
    Type: Application
    Filed: May 31, 2001
    Publication date: January 17, 2002
    Applicant: Duratek, Inc.
    Inventor: David Tu
  • Patent number: D538611
    Type: Grant
    Filed: August 18, 2005
    Date of Patent: March 20, 2007
    Assignee: Duratek, Inc.
    Inventors: Garvin Clay Morris, Bryan Woody, Daryl Lance Lowe, Phillip Norman