Abstract: A modular device of tubular plasma source mainly includes at least two tubular antennae, one RF power supply and one reference potential. The tubular antennae are arranged side by side for inducing plasma. Each tubular antenna includes an induction coil being a spiral spring shape, and a dielectric sleeve having a hollow through hole for putting in the induction coil. The RF power supply connects with the induction coil in parallel or in series, the reference potential refers to the RF power supply and connects with the induction coil.