Patents Assigned to Etec Corporation
  • Patent number: 3958124
    Abstract: An improved method and apparatus for facilitating specimen handling during freezing, coating and transfer to and from the main chamber of an SEM. A unique specimen shuttle manipulable by a control rod permits transfer of a specimen between the main chamber and an auxiliary air lock chamber alternatively defined by an air lock housing and a coating apparatus housing. Either housing is removably attached to an entrance flange communicating via a gate valve assembly with the main chamber and is provided with a sealable access aperture for enabling transfer of both frozen and unfrozen specimens to and from the airlock chamber. The specimen manipulator enables specimen attachment and removal from the shuttle and has a frost shield for eliminating frost formation on the specimen surface during handling after freezing.
    Type: Grant
    Filed: September 5, 1974
    Date of Patent: May 18, 1976
    Assignee: Etec Corporation
    Inventors: George R. Koch, Carl T. Petersen