Abstract: A mechanical seal which can provide stable sealing performance over a long period of time. A rotating ring unit 100 includes an annular elastic seal 130 having a first annular part 131 to which a rotating ring 110 is fitted and thus fixed on an inner circumferential surface side thereof, a second annular part 133 provided in close contact with an outer circumferential surface of a rotating shaft, and a curved part 132 which connects the first and second annular parts 131 and 133 and follows a positional change of the second annular part 133 with respect to the first annular part 131, an annular tightening member 140 which tightens an outer circumferential surface of the second annular part 133 on the rotating shaft, and a metal case 120 including an annular fitting part 121 to which the first annular part 131 is fitted and thus fixed on the inner circumferential surface side thereof.

Abstract: Provided are a set screw, a fixing structure, a fixing method and a sealing structure that can reduce an exposed amount of a set screw and prevent the set screw from coming off a female thread. A fixing structure for fixing a first member 20 in which a female thread 21 is formed and a second member 30 which is provided to be slidable with respect to the first member 20, and in which a through-hole 31 is formed that has a diameter smaller than an inner diameter of the female thread 21, wherein the second member 30 is positioned with respect to the first member 20 in a state in which center axes of the female thread 21 and the through-hole 31 coincide with each other, the set screw 10 is engaged in the female thread 21, and the small diameter portion 13 is inserted into the through-hole 31, whereby the first member 20 and the second member 30 are fixed to each other.

Abstract: A magnetic fluid seal includes an outer cylinder member with a heat barrier that internally houses a rotating shaft extending from a housing of a fluid machine and includes an attachment portion to be attached to the housing, magnetic pole members that are disposed around the rotating shaft housed in the outer cylinder member and form a magnetic circuit, and sealing films that are magnetically connected to the magnetic circuit, are respectively disposed between the magnetic pole members and the rotating shaft, are made of magnetic fluids, and are formed in an axial direction.

Abstract: In an embodiment, a mechanical seal device has a mating ring (131) that rotates with a rotating shaft (101), as well as an opposing seal ring (133) that slidably contacts the mating ring (131), so as to seal between the rotating shaft (101) and a seal cover (105) fixed to an equipment main body (102); wherein the seal cover (105) is a split structure comprising at least a first seal cover (107, 108) and second seal cover (106), the first seal cover (107, 108) is detachably connected in the axial direction by leaving the second seal cover (106) free from it, and the seal ring (133) is connected to the first seal cover (107, 108) in a securely following manner.

Abstract: A mechanical seal device has a mating ring that rotates with a rotating shaft, as well as a seal ring that slidably contacts the mating right, so as to seal between the rotating shaft and a seal cover fixed to an equipment main body, wherein the seal cover is a split structure comprising at least an inner-diameter-side seal cover and an outer-diameter-side seal cover, the inner-diameter-side seal cover is detachably connected to the outer-diameter-side seal cover, and the seal ring is connected to the inner-diameter-side seal cover in a securely following manner.

Abstract: In an assembly method of a magnetic fluid seal (100) that includes a magnetic field forming member (130) divided in a circumferential direction, a magnetic pole member (120) including a pair of magnetic fluid retaining portions (121, 122) and a coupling portion (123) that couples them, a first bearing (160) and a second bearing (170), a step of fixing the first bearing (160) to a shaft (400) in a state in which the shaft (400) is directed in a vertical direction, a step of attaching the magnetic pole member (120) from above the first bearing (160), a step of fixing the second bearing (170) to the shaft (400) from above the magnetic pole member (120) to thereby fix the magnetic pole member (120) in a state in which the magnetic pole member (120) is positioned with respect to the shaft (400); and a step of attaching the magnetic field forming member (130) between the pair of magnetic fluid retaining portions (121, 122) are performed in order.

Abstract: A mechanical seal has a seal ring and a mating ring that faces and slides against the seal ring and either the seal ring or mating ring is supported via a bellows on the equipment interior side of a seal cover installed on a housing, while the other rotates together with a rotational shaft; and a baffle sleeve with a roughly L-shaped cross-section is fixed on the equipment exterior side of the seal cover to guide quenching liquid to the sliding surfaces of the seal ring and mating ring, where the baffle sleeve is structurally split into a flange part and cylinder part. The mechanical seal allows for preassembly of its seal members on the stationary side, baffle sleeve, damper, and other related parts at a factory, service center, etc., in a reliable and controlled manner, requiring fewer assembly steps during onsite engineering works.

Abstract: An inside-type mechanical seal is mounted between a rotating shaft and a housing, and adapted for preventing leakage of a sealed fluid from an outer circumference of a sliding surface in the direction of an inner circumference thereof, wherein provided are a rotary-side sealing ring mounted on a rotating shaft side, a stationary-side sealing ring mounted on a seal case side, an annular packing for pushing the stationary-side sealing ring toward the rotary-side sealing ring, a holding part on the outer circumferential side being fitted in the seal case, and a seal lip part on the inner circumferential side being in close contact with the stationary-side sealing ring, and wherein provided to the seal case is a ring-shaped projection abutting against a back surface of the packing during assembly of the mechanical seal, and adapted for pushing the packing toward the stationary-side sealing ring.

Abstract: In an embodiment, a mechanical seal device has a mating ring (31) that rotates with a rotating shaft (1), as well as a seal ring (33) that slidably contacts the mating ring (31), so as to seal between the rotating shaft (1) and a seal cover (5) fixed to an equipment main body (2), wherein the seal cover (5) is a split structure comprising at least an inner-diameter-side seal cover (8) and an outer-diameter-side seal cover (7), the inner-diameter-side seal cover (8) is detachably connected to the outer-diameter-side seal cover (7), and the seal ring (33) is connected to the inner-diameter-side seal cover (8) in a securely following manner.

Abstract: A mechanical seal having a seal cover that has a high versatility and is less prone to deformation even when secured to a housing by two bolts is provided. A mechanical seal 100 includes a rotating ring 40, a stationary ring 20, and a seal cover 10 to attach the stationary ring 20 to a housing 300. The seal cover 10 includes two U-shaped grooves 11 and two elongate holes 12 for bolting, which are disposed alternately and at regular intervals in a circumferential direction of the shaft hole, and elongate holes 12 are elongate in a radial direction of the shaft hole and innermost positions within the elongate holes 12 where bolt shanks can pass through are located further inward than innermost positions within the U-shaped grooves 11 where bolt shanks can pass through.

Abstract: Provided is a mechanical seal that has an improved accuracy of positioning a plurality of divided bodies that compose a seal ring. A mechanical seal for sealing an annular gap between a rotary shaft and a housing, comprising: a divided-type seal ring that is an annular seal ring composed by combining a plurality of divided bodies; is characterized by comprising metallic bands that fix the plurality of divided bodies by clamping outer peripheral surfaces of the plurality of divided bodies.

Abstract: A sealing device includes a pumping ring capable of increasing the flow amount of the fluid to be self-circulated, and thereby increasing the head. The pumping ring (160) includes: a through hole (161) that is provided so as to pass through the pumping ring (160) from an inner peripheral surface to an outer peripheral surface and serves as a passage of the fluid; and an inlet groove (162) that is provided on the inner peripheral surface so as to run from a side face on a side where the mechanical seal (M) is disposed to the through hole (161), and leads the fluid into the through hole (161), and on an outer peripheral surface of the sleeve (110), an auxiliary inlet groove (111) that leads the fluid into the through hole (161) is provided at a position opposing the inlet groove (162) and the through hole (161).

Abstract: An accordion-structured welded bellows for a semiconductor-manufacturing device is characterized in that a plurality of annular bellows plates having curved surfaces in a radial direction are connected in an alternating fashion on the outside-diameter side and the inside-diameter side, wherein the annular bellows plates have a processing-side bellows plate and a non-processing-side bellows plate, a gas layer is interposed between the two bellows plates, the processing-side bellows plate is configured as a thick plate, and the non-processing-side bellows plate is configured as a thin plate. The welded bellows is less likely to be damaged by foreign matter and to be able to use the non-processing-side bellows plate to compensate for any damage to the processing-side bellows plate.

Abstract: In an embodiment, a bellows seal is characterized by having a bellows 11 installed on the inner periphery side of the seal cover 3 between a seal cover 3 and first seal ring 8 in a manner freely extendable/contractible in the axial direction, as well as a spring 13 installed on the inner periphery side of the seal cover 3 to bias the first seal ring 8 in the direction of the second seal ring 9, wherein the first seal ring 8 is hermetically coupled by a lap joint to the end face of a retainer 12 fixed to the bellows 11, and the first seal ring 8 and retainer 12 are installed on the seal cover 3 side in a manner prevented from turning by a knock pin 17.

Abstract: A mechanical seal having a seal cover that has a high versatility and is less prone to deformation even when secured to a housing by two bolts is provided. A mechanical seal 100 includes a rotating ring 40, a stationary ring 20, and a seal cover 10 to attach the stationary ring 20 to a housing 300. The seal cover 10 includes two U-shaped grooves 11 and two elongate holes 12 for bolting, which are disposed alternately and at regular intervals in a circumferential direction of the shaft hole, and elongate holes 12 are elongate in a radial direction of the shaft hole and innermost positions within the elongate holes 12 where bolt shanks can pass through are located further inward than innermost positions within the U-shaped grooves 11 where bolt shanks can pass through.

Abstract: A semiconductor fabrication device welded bellows of an accordion structure is characterized in that a plurality of annular bellows plates having faces curving in a radial direction are connected alternatingly at the outside diameter side and inside diameter side, wherein the annular bellows plates are provided with a treatment-side bellows plate and a non-treatment-side bellows plate, a gas layer disposed between the two bellows plates, the treatment-side bellows plate being of lesser thickness, and the non-treatment-side bellows plate being of greater thickness. The bellows are highly resistant to damage caused by foreign matter; or, in the unlikely case that the treatment-side bellows plate becomes damaged, the damage can be compensated for by the non-treatment side bellows plate.

Abstract: An inside-type mechanical seal is mounted between a rotating shaft and a housing, and adapted for preventing leakage of a sealed fluid from an outer circumference of a sliding surface in the direction of an inner circumference thereof, wherein provided are a rotary-side sealing ring mounted on a rotating shaft side, a stationary-side sealing ring mounted on a seal case side, an annular packing for pushing the stationary-side sealing ring toward the rotary-side sealing ring, a holding part on the outer circumferential side being fitted in the seal case, and a seal lip part on the inner circumferential side being in close contact with the stationary-side sealing ring, and wherein provided to the seal case is a ring-shaped projection abutting against a back surface of the packing during assembly of the mechanical seal, and adapted for pushing the packing toward the stationary-side sealing ring.

Abstract: An accordion-structured welded bellows for a semiconductor-manufacturing device is characterized in that a plurality of annular bellows plates having curved surfaces in a radial direction are connected in an alternating fashion on the outside-diameter side and the inside-diameter side, wherein the annular bellows plates have a processing-side bellows plate and a non-processing-side bellows plate, a gas layer is interposed between the two bellows plates, the processing-side bellows plate is configured as a thick plate, and the non-processing-side bellows plate is configured as a thin plate. The welded bellows is less likely to be damaged by foreign matter and to be able to use the non-processing-side bellows plate to compensate for any damage to the processing-side bellows plate.

Abstract: A semiconductor fabrication device welded bellows of an accordion structure is characterized in that a plurality of annular bellows plates having faces curving in a radial direction are connected alternatingly at the outside diameter side and inside diameter side, wherein the annular bellows plates are provided with a treatment-side bellows plate and a non-treatment-side bellows plate, a gas layer disposed between the two bellows plates, the treatment-side bellows plate being of lesser thickness, and the non-treatment-side bellows plate being of greater thickness. The bellows are highly resistant to damage caused by foreign matter; or, in the unlikely case that the treatment-side bellows plate becomes damaged, the damage can be compensated for by the non-treatment side bellows plate.