Patents Assigned to EBARA CORPORATION, Tokyo, Japan
  • Solution containing metal component, method of and apparatus for forming thin metal film
    Publication number: 20030224104
    Abstract: A solution containing a metal component comprises composite ultrafine metal particles each having a core substantially made of a metal component and a covering layer made of an organic compound chemically bonded to the core. The core has an average diameter ranging from 1 to 10 nm. The composite ultrafine metal particles are uniformly dispersed in a solvent.
    Type: Application
    Filed: June 19, 2003
    Publication date: December 4, 2003
    Applicant: EBARA CORPORATION, Tokyo, Japan
    Inventors: Akira Fukunaga, Hiroshi Nagasawa, Takao Kato