Patents Assigned to Ebara Germany GmbH
  • Patent number: 5769626
    Abstract: An evacuation system (1) with exhaust gas cleaning, consists of at least one vacuum pump unit (4) and at least one cleaning unit (10) in series as to enable the continuous flow of fluid media supplied by the vacuum pump unit (4). In order to prevent condensates in a gas connection pipe (9) and in order to decrease the surface area, the at least one vacuum pump unit (4) and the at least one cleaning unit (10) are compressed into substantially one component, and the gas connection pipe (9) which runs between the vacuum pump unit (4) and the cleaning unit (10) is run in the shortest possible path and is, as a result, kept at a temperature which is above the condensation temperature of constituents in the fluid media capable of condensation, essentially without the addition of external heat, with only the compression heat of the vacuum pump unit (4). Further, a central control unit (16) for the vacuum pump unit (4) and the cleaning unit (10) can be placed over the at least one vacuum pump unit (4).
    Type: Grant
    Filed: April 25, 1996
    Date of Patent: June 23, 1998
    Assignee: Ebara Germany GmbH
    Inventors: Alfred Hauff, Volker Kinzig