Patents Assigned to Ebetech Electron-Beam Technology Vertriebs GmbH
  • Method and apparatus for testing the function of microstructure elements
    Patent number: 5834773
    Abstract: The invention relates to a method as well as to apparatus for testing the function of microstructure elements, wherein the microstructure element is driven for testing the emission and/or mechanical properties and the corpuscles emitted or reflected by it are detected and evaluated.
    Type: Grant
    Filed: June 6, 1996
    Date of Patent: November 10, 1998
    Assignee: Ebetech Electron-Beam Technology Vertriebs GmbH
    Inventors: Matthias Brunner, Hans-Peter Feuerbaum, Jurgen Frosien