Patents Assigned to Ecolive Technologies LTD.
  • Chemical vapor deposition reactor having ceramic lining for production of polysilicon
    Patent number: 9145303
    Abstract: Apparatus configured to produce polysilicon by chemical vapor deposition, including a reactor vessel having an inner surface defining at least a portion of a chamber, the inner surface having a lining of quartz ceramic. The apparatus also includes a silicon substrate disposed within the chamber of the reactor vessel, the silicon substrate having a deposition surface upon which polysilicon is deposited. Methods of producing polysilicon using such apparatus, as well as methods for applying the quartz ceramic lining onto a reactor vessel, are also provided.
    Type: Grant
    Filed: February 15, 2013
    Date of Patent: September 29, 2015
    Assignee: ECOLIVE TECHNOLOGIES LTD.
    Inventors: Anatoly Alexandrovich Goncharov, Yury Dmitrievich Kalashnikov
  • CHEMICAL VAPOR DEPOSITION REACTOR HAVING CERAMIC LINING FOR PRODUCTION OF POLYSILICON
    Publication number: 20140235041
    Abstract: Apparatus configured to produce polysilicon by chemical vapor deposition, including a reactor vessel having an inner surface defining at least a portion of a chamber, the inner surface having a lining of quartz ceramic. The apparatus also includes a silicon substrate disposed within the chamber of the reactor vessel, the silicon substrate having a deposition surface upon which polysilicon is deposited. Methods of producing polysilicon using such apparatus, as well as methods for applying the quartz ceramic lining onto a reactor vessel, are also provided.
    Type: Application
    Filed: February 15, 2013
    Publication date: August 21, 2014
    Applicant: Ecolive Technologies LTD.
    Inventors: Anatoly Alexandrovich Goncharov, Yury Dmitrievich Kalashnikov