Abstract: A semiconductor wafer cassette roller type transportation structure system includes a roller type transportation structure body, a rotating transportation structure body, and a lateral movement transportation structure body. The roller type transportation structure system includes connected left and right supporting frames. A plurality of large rollers are provided on an inner surface end of each of the right and left supporting frames. A plurality of small rollers are provided under the large rollers. A plurality of driving wheels are provided under the large rollers. The large and small rollers are driven by a driving belt. The driving wheels can linearly move a wafer cassette. In response to the roller type transportation structure body transporting the wafer cassette, the rotating transportation structure body rotates to change a movement direction of the wafer cassette, and the lateral movement transportation structure body transports the wafer cassette along a lateral movement direction.

Abstract: A semiconductor wafer cassette warehouse transportation structure system includes a wafer cassette lift transportation structure body, a wafer cassette frame structure body, an arm structure body, an arm gripping wafer cassette structure body, and a wafer cassette warehouse structure body. The suspension support rods are suspended on a ceiling. The wafer cassette lift transportation structure body lifts the wafer cassettes to the inlet and outlet. The arm structure body grips the wafer cassettes and puts same on the tracks so that the wafer cassettes can be transported to the wafer cassette warehouse structure body to be precisely accessed. The system saves space and facilitates the access of the wafer cassettes because the wafer cassettes are stored on the wafer cassette warehouse structure body suspended on the ceiling.