Abstract: A vacuum pump includes: a casing formed with an inlet port or outlet port; a stator disposed inside the casing; and a rotor enclosed in the casing and including a shaft rotatably supported on the stator, and a rotor blade formed in a cylindrical shape with a plurality of blades arranged in multiple stages on an outer circumferential portion thereof, and secured to the shaft such as to be integrally rotatable therewith. The rotor blade is provided with a rupture location control groove as a rupture location control means that locally reduces rigidity of the rotor blade to control a location where the rotor blade ruptures.

Abstract: A vacuum pump and a control device are capable of accurately determining timing of rotor blade replacement by creating an index which allows a degree of fatigue of a rotor blade to be determined quantitatively and easily. A motor current value output from a motor drive control portion is input to a time count processing portion, and time in which a current value of a rotating body remains in a range of a stage is totalized for each stage of the current value in the time count processing portion. A rotor blade temperature value output from a rotor blade temperature measurement portion is also input to the time count processing portion. A one-minute average value of the rotor blade temperature value acquired by sampling is calculated. For each stage of the rotor blade temperature value, time in which the average value remains in a range of the stage is totalized.

Abstract: A vacuum pump and a washer which can reduce vibration of a rotor and the rotor which can reduce the vibration are provided. When an inertia moment ratio which is a ratio between the inertia moment around a z-axis and the inertia moment around an x-axis or a y-axis is larger than 1, a natural frequency ?2 does not match a rotational frequency ?z but goes away from that. When the natural frequency ?2 matches the rotational frequency ?z, the rotor vibrates and thus, a fatigue failure occurs in a rotor blade. When the rotor is to be made larger in a radial direction of a rotating shaft, a value of the inertia moment ratio is set to a value larger than 1.

Abstract: A main-body casing having an inlet port or an outlet port, a rotatable rotor shaft, and a rotor coupled to the rotor shaft are provided. A recess portion opened toward the inlet port is formed in the rotor and a fastening portion (a first shaft portion and a second shaft portion) of the rotor shaft is exposed to the recess portion. A cover portion, which is fastened to the fastening portion by a cover-portion fixing bolt and covers at least a part of the recess portion, is formed having a container shape and has a reinforcing portion located in a periphery of the fastening portion that prevents deflection by increasing rigidity. The cover portion also has a contact-pressure generating portion which is pressed by fastening to the fastening portion in a fastening direction and causes a contact pressure to be generated in the fastening direction.

Abstract: To provide a vacuum pump which separates and constructs an inlet port flange and a casing (outer cylinder) as two components to reduce weight while retaining required strength and which is consequently capable of reducing manufacturing cost. In a vacuum pump, an inlet port flange and a casing (outer cylinder) are separated from each other and constructed as different members. The inlet port flange uses stainless steel as a material thereof and the casing (outer cylinder) use aluminum as a material thereof. The components are fastened to each other by bolts and sealed by an O-ring in order to maintain a vacuum property during assembly of the vacuum pump. Accordingly, a weight of the vacuum pump can be reduced while maintaining strength of the inlet port flange.

Abstract: A vacuum pump which can prevent lowering of an exhaust performance of the vacuum pump, even if a linked-type thread groove spacer is fastened by a fixing bolt, is provided. The linked-type thread groove spacer according to an embodiment of the present invention includes a structure for linking a Siegbahn pump portion and a thread-groove pump portion. When this linked-type thread groove spacer is to be fastened, a countersunk hole is provided in advance in an exhaust channel portion, and the linked-type thread groove spacer is fastened to a base by a fixing bolt. As a result, a head part of the fixing bolt does not protrude to the exhaust channel, and the head part of the fixing bolt does not make resistance against an exhaust gas. Thus, lowering of the exhaust performance of the vacuum pump can be suppressed.

Abstract: A deposited material sensor is arranged, in a flow path of a gas from an inlet port to an outlet port, on an upstream side or a downstream side of a predetermined flow path position where a cause of disruption to operation of the vacuum pump is to occur. In addition, the deposited material sensor detects a presence or absence of deposited material at the arrangement position of the deposited material sensor, and the arrangement position of the deposited material sensor is a position where a thickness of the deposited material at the predetermined flow path position assumes a predetermined thickness that corresponds to a maintenance time of maintenance for suppressing the cause when a detection state of the deposited material sensor changes from deposited material absent to deposited material present.

Abstract: A vacuum pump suitable for prolonging the life of a heating means used as a measure to prevent product deposition in the vacuum pump, and a heating device for the vacuum pump. A vacuum pump that exhausts gas by rotation of a rotating body has an exhaust flow path for exhausting the gas, and a heating means for heating the exhaust flow path, wherein the heating means has a plurality of resistance heating elements connected in parallel to a pair of wiring lines. The heating means has a current measuring means for measuring a sum of values of currents flowing through the plurality of resistance heating elements, a determination means for determining failure conditions of the plurality of resistance heating elements on the basis of a measured value obtained by the current measuring means, and an output means for outputting the failure conditions determined by the determination means.

Abstract: Provided is a vacuum pump regarding which compression can be improved at low costs. Included is a plurality of Siegbahn exhaust mechanisms in which a helical groove is provided to a stator disc. The Siegbahn exhaust mechanisms are provided on both faces of an upstream side and a downstream side of the stator disc. An end portion of the helical groove provided on the upstream side and a start portion of the helical groove provided on the downstream side are situated at least partially overlapping in a circumferential direction. A width of a channel of a switchback portion of the upstream side and the downstream side is equivalent or less than a depth of a channel of the Siegbahn exhaust mechanisms.

Abstract: Uniform exhaustion can be realized with a relatively simple structure in a vacuum pump device. A vacuum pump portion includes an outer rotor and an inner stator, a lifting-type gate valve portion includes a valve body and a valve seat, and the valve body is lifted/lowered with respect to the valve seat along a rotating shaft direction. And the inner stator includes a through hole along the rotating shaft direction of the vacuum pump portion, and at least a part of a supporting member which supports the valve body is disposed in the through hole.

Abstract: To provide a vacuum pump capable of efficiently cooling electrical equipment. The vacuum pump comprises a pump main body, and an electrical equipment case disposed outside the pump main body, wherein the electrical equipment case includes a cooling jacket in which a cooling medium flow passage is formed, and a power supply circuit portion that has a circuit component and can be cooled by the cooling jacket, the power supply circuit portion being attached to the cooling jacket so that heat from the electrical component portion can be transferred, and the cooling jacket includes a jacket main body and a cooling pipe for circulating cooling water in the jacket main body, and partially exposes the cooling pipe toward the power supply circuit portion.

Abstract: A pressure difference of liquid is generated between an upper end and a lower end of a thread groove by the action of a thread groove pump formed between the thread groove and a lower end wall portion of a rotating rotor shaft. As a result, liquid of a bottom space is sucked up and passes through a hollow hole and is discharged to the outside of the rotor shaft through communication holes. The discharged liquid passes through the inside of a hub of a rotating body and reaches an extension member where it is sprayed radially in the form of droplets from a protrusion. The droplets are received by a partition wall. Due to the presence of a protrusion in an upper portion of the partition wall, the droplets cannot cross over the partition wall. The accumulated liquid drops through a communication hole to the bottom space.

Abstract: A vacuum pump includes a linked-type thread-groove spacer which is a structure for linking a Siegbahn pump portion and a thread-groove pump portion, and when an outlet position of a thread groove which is an exhaust channel portion of this linked-type thread-groove spacer is in a vicinity of the stator portion (stator bolt) of the stator column, conductance of the exhaust channel is lowered. Thus, phases in a circumferential direction of installation positions of a thread ridge of the linked-type thread-groove spacer and the stator portion of the stator column are aligned as much as possible. In other words, the thread groove of the linked-type thread-groove spacer which is the exhaust channel is provided between the installation positions of the stator portions in the circumferential direction of the stator column so that lowering of the conductance of the exhaust channel is suppressed.

Abstract: A vacuum pump capable of removing side reaction products without overhaul is provided. The vacuum pump includes A motor for rotating a rotor, a heater capable of raising a temperature, a base spacer for holding the heater, a controller capable of controlling the heater by switching an operation mode between a normal operation mode and a cleaning operation mode, and a storage portion storing information on a set temperature relating to the heater, the storage portion stores at least first temperature information for the normal operation mode, or more specifically, set temperature information capable of using the pump without nonconformity, second temperature information for the cleaning operation mode, or more specifically, set temperature information capable of re-gasifying side reaction products generated during the normal operation mode, and the temperature represented by the second temperature information is higher than the temperature represented by the first temperature information.

Abstract: A magnetic bearing control apparatus and a vacuum pump which do not require a displacement sensor, which enable control with high accuracy, and which are small and low cost. A rate of change (di/dt) that is a time derivative of a current value Im flowing through an electromagnet varies in accordance with a magnitude of a displacement of a gap between a target member and the electromagnet. The rate of change (di/dt) can be obtained by detecting a voltage value Vs that is generated at both ends of an inductive element. Therefore, by detecting the voltage value Vs, the magnitude of the displacement of the gap can be estimated by calculation. Inductive elements are connected in series to electromagnets and the voltage Vs between the inductive elements is detected by the differential input amplifier. A single period of switching of a PWM switching amplifier is constituted by a current control period of the electromagnet and a displacement detection period for detecting the rate of change (di/dt).

Abstract: A vacuum pump includes a rotor provided with a plurality of rotor blades and a rotor cylinder portion, a driving portion, a bearing, stator blades, a thread groove stator that is disposed downstream of the stator blades and has an inner peripheral surface facing an outer peripheral surface of the rotor cylinder portion, and a heat insulating wall disposed downstream of the thread groove. The heat insulating wall includes a ring-shaped annular portion, and a substantially cylindrical wall portion extending from an inner portion of the annular portion in the radial direction to the upstream side and forming a flow path on the outer peripheral surface side. A first corner portion is formed between an upstream-side surface of the annular portion and the outer peripheral surface of the wall portion, the first corner portion being formed in an arc shape.

Abstract: A position deviation calculated by a subtractor of a vacuum pump is input to the PIDs of three modes. The first PID is a PID controller for a high-bias mode, the second PID is a PID controller for a high-rigidity mode, and the third PID is a PID controller for a low-rigidity mode. The output signal of the third PID is extracted as a change of an indicator current for each clock of a PWM frequency and then the mean value of a change of an indicator current for several clocks is determined in a calculating unit. At this point, a switching control unit performs an operation on whether the mean value of the averaged change of the indicator current is larger than a preset redetermined value and then according to the result, an ? value is outputted in the range of 0 to 1 from the switching control unit.

Abstract: A vacuum pump includes a plurality of exhaust stages provided between an inlet port and an exhaust port so as to function as means for exhausting gas molecules, and a number of blades provided between the inlet port and an uppermost exhaust stage of the plurality of exhaust stages so as to rotate together with a rotary blade that constitutes the uppermost exhaust stage as a particle transport stage for transporting particles in an exhaust direction of the gas molecules, the number being smaller than the number of rotary blades that constitutes the uppermost exhaust stage.

Abstract: A vacuum pump which can decompose depositions by radicals and effectively exhaust them is provided. The vacuum pump including a casing, a stator disposed on an inner side of the casing, and a shaft rotatably supported with respect to the stator and also including a cylindrical rotor rotatably enclosed together with the shaft in the casing, in which an electrode portion, which is a part of a radical generating device that generates radicals, is disposed in the casing.

Abstract: An object of the present invention is to provide a dry pump and an exhaust gas treatment method which can improve an effect of inhibiting a reaction product from adhering to the inside of a gas outlet port of the dry pump, a gas exhaust pipe, or the like and can also improve an energy saving effect. To attain the object, the present invention includes the gas exhaust pipe disposed to be connected to the gas outlet port of the dry pump and to a gas inlet port of a detoxification device, and a heat exchanger which heats a diluent gas introduced therein using a heat generated from the dry pump and introduces the heated diluent gas into the gas exhaust pipe to heat a used gas to a temperature of not less than a predetermined value.