Patents Assigned to Edwards Limited Japan
  • DEPOSIT DETECTION DEVICE FOR EXHAUST PUMP AND EXHAUST PUMP
    Publication number: 20150114101
    Abstract: A deposit detection device for an exhaust pump is provided, which can be easily put into operation without the burdens of, for example, installing equipment for flowing a gas, or adding or changing operation modes in apparatuses.
    Type: Application
    Filed: March 7, 2013
    Publication date: April 30, 2015
    Applicant: Edwards Limited Japan
    Inventor: Yoshihiro Enomoto