Patents Assigned to Edwards, S.R.O.
  • Cleaning method
    Patent number: 11517942
    Abstract: The present invention provides a method for cleaning a component for use in an ultra-high vacuum. The method may comprise the steps of placing the component to be cleaned in a vacuum furnace chamber; plasma cleaning the component at a temperature of greater than about 80° C.; and evacuating the chamber to a pressure of less than about 10E-5 mbar. Apparatus for performing such methods and kits comprising said components are also provided.
    Type: Grant
    Filed: February 12, 2018
    Date of Patent: December 6, 2022
    Assignee: Edwards, S.R.O.
    Inventors: Martin Zahradka, Miroslav Strasil