Abstract: A GaN transistor with polysilicon layers for creating additional components for an integrated circuit. The GaN device includes an EPI structure and an insulating material disposed over EPI structure. Furthermore, one or more polysilicon layers are disposed in the insulating material with the polysilicon layers having one or more n-type regions and p-type regions. The device further includes metal interconnects disposed on the insulating material and vias disposed in the insulating material layer that connect source and drain metals to the n-type and p-type regions of the polysilicon layer.
Type:
Grant
Filed:
July 29, 2014
Date of Patent:
December 15, 2015
Assignee:
Efficient Power Coversion Corporation
Inventors:
Jianjun Cao, Robert Beach, Alexander Lidow, Alana Nakata, Guangyuan Zhao, Yanping Ma, Robert Strittmatter, Michael A. De Rooji, Chunhua Zhou, Seshadri Kolluri, Fang Chang Liu, Ming-Kun Chiang, Jiali Cao, Agus Jauhar