Abstract: A servo valve for precisely controlling a position of a pneumatic cylinder does not require a servo amplifier and a small sized and/or high durability servo valve unit. The servo valve comprises a unit body having first and second portions, first and second valve portions, first and second seal members that open and close the first and second valve portions, respectively, first and second drive mechanisms that drive first and second seal members by first and second electric pulses, respectively, a supply flow path between the first end and first valve, an exhaust flow path between the second end and second valve, a common flow path connected to the supply and exhaust flow paths via first and second valve portions, and a drive flow path connected to the pneumatic actuator. First and second drive mechanisms are arranged in a drive mechanism arrangement portion located between first and second end portions.

Abstract: Provided is a rotation drive device that has a wide rotary driving range, e.g. a rotary driving range of 0°-180°. Disclosed is a rotation drive device comprising a crank member rotatable about a crank axis, a first cylinder having a first piston and rotatable about a first cylinder rotation axis, and a second cylinder having a second piston and rotatable about a second cylinder rotation axis. The crank member and the first piston are coupled for rotation about a first piston rotation axis spaced from the crank axis. The crank member and the first piston are coupled for rotation about a second piston rotation axis spaced from the crank axis.

Abstract: A cleaner has a power source, a vacuum generator, a waste liquid tank and a wiper-nozzle unit. Liquids and/or contaminants may be removed by slidably moving a wiper on a flat surface to collect a mass of liquid and inserting a small-sized nozzle into the collected liquid to suck it through the nozzle when the interior of the cleaner is drawn into vacuum. Since the small-sized nozzle is located adjacent the wiper, less air will be sucked in by the cleaner when the collected liquid is sucked in by the nozzle. Therefore, the cleaner can be driven by a reduced power and also reduced in size and weight.