Abstract: An inspection system that is effective to collect images of a part under inspection. This inspection system includes (a) a three axis linear motion stage; (b) a rotary fourth axis stage configured to hold and rotate an object to be inspected. This rotary fourth axis stage is mounted on the three axis linear stage; (c) a fifth axis camera and optical system mounted to one of the axes of the three axis linear motion stage. This fifth axis camera has an optical axis substantially parallel to the axis of linear motion; (d) a 45 degree mirror configured to bend the optical axis of the fifth axis camera by 90° to point towards the object; and (e) a motor configured to rotate the mirror over a range of angles to obtain a fifth axis of viewing orientation.
Type:
Grant
Filed:
May 6, 2015
Date of Patent:
April 10, 2018
Assignee:
Electro Scienctific Industries, Inc.
Inventors:
Daniel Freifeld, John Burnett, Minh Chau Ngo