Patents Assigned to Electron Tranfer Technologies - Justia Patents Search

Patents Assigned to Electron Tranfer Technologies

Method and apparatus for constant composition delivery of hydride gases for semiconductor processing

Patent number: 5925232

Abstract: Described are methods and apparatuses for the electrochemical generation and constant concentration delivery of high purity gases used in the production of semiconductors and the doping of semiconductors.

Type: Grant

Filed: December 6, 1996

Date of Patent: July 20, 1999

Assignee: Electron Tranfer Technologies

Inventor: William M. Ayers