Patents Assigned to Electronic Industries Association of Japan
  • Dry etching gas
    Patent number: 6514425
    Abstract: Disclosed is fluorocarbon-based dry etching gas which is free of global environmental problems and a dry etching method using a plasma gas obtained therefrom. The dry etching gas includes a fluorinated ether of carbon, fluorine, hydrogen and oxygen and having 2-6 carbon atoms.
    Type: Grant
    Filed: July 2, 1999
    Date of Patent: February 4, 2003
    Assignees: Agency of Industrial Science and Technology, The Mechanical Social Systems Foundation of Mita Building, Electronic Industries Association of Japan, Asahi Glass Co., Ltd., Daikin Industries, Ltd. of Umeda Center Building
    Inventors: Akira Sekiya, Tetsuya Takagaki, Shinsuke Morikawa, Shunichi Yamashita, Tsuyoshi Takaichi, Yasuo Hibino, Yasuhisa Furutaka, Masami Iwasaki, Norifumi Ohtsuka
  • Dry etching method
    Patent number: 6383403
    Abstract: A substrate to be etched is subjected to dry etching by using a dry etching gas containing a perfluorocycloolefin while a plasma with a high density region of at least 1010/cm3 is generated. As the perfluorocycloolefin, those having 3 to 8 carbon atoms, especially 4 to 6 carbon atoms are preferably used.
    Type: Grant
    Filed: April 30, 1999
    Date of Patent: May 7, 2002
    Assignees: Japan as represented by the Director General of the Agency of Industrial Science and Technology, The Mechanical Social Systems Foundation, Electronic Industries Association of Japan, Nippon Zeon Co., Ltd.
    Inventors: Akira Sekiya, Toshiro Yamada, Kuniaki Goto, Tetsuya Takagaki
  • Gas composition for dry etching and process of dry etching
    Patent number: 6322715
    Abstract: A gaseous composition for dry etching, comprising a perfluorocycloolefin and 1 to 40% by mole, based on the perfluorocycloolefin, of at least one oxygen ingredient selected from oxygen gas and oxygen-containing gaseous compounds. As the perfluorocycloolefin, those having 3 to 8 carbon atoms, especially 4 to 6 carbon atoms, are preferably used.
    Type: Grant
    Filed: April 30, 1999
    Date of Patent: November 27, 2001
    Assignees: Japan as represented by Director General of the Agency of Industrial Science and Technology, The Mechanical Social Systems Foundation, Electronics Industries Association of Japan, Nippon Zeon Co., Ltd.
    Inventors: Akira Sekiya, Toshiro Yamada, Kuniaki Goto, Tetsuya Takagaki