Abstract: Methods and articles for controlling the surface of an alloy substrate for deposition of an epitaxial layer. The invention includes the use of an intermediate layer to stabilize the substrate surface against oxidation for subsequent deposition of an epitaxial layer.
Type:
Grant
Filed:
July 14, 2000
Date of Patent:
May 4, 2004
Assignees:
Electronic Power Research Institute, Incorporated, The Regents of the University of California
Inventors:
Leslie G. Fritzemeier, Qi Li, Martin W. Rupich, Elliott D. Thompson, Edward J. Siegal, Cornelis Leo Hans Thieme, Suresh Annavarapu, Paul N. Arendt, Stephen R. Foltyn