Abstract: A method and a system for implementing the method for determining an exposure gap between a mask and a resist material are provided. A first gratings is provided on one or more sides of a first structure defined by one or more first regions of the mask. A second gratings is provided on one or more sides of a second structure defined be one or more second regions of the mask. The first and the second structures are exposed to incident energy and the difference between a location in the first structure and a location in the second structure is measured. The exposure zap is extrapolated from the difference. The first and second structures are provided on the mask. The first gratings and the second gratings is provided by a mask writing tool.
Type:
Grant
Filed:
February 10, 2000
Date of Patent:
April 6, 2004
Assignees:
BAE Systems Information, Electronic Systems Integration, Inc.
Abstract: A single event upset hardened memory cell to be utilized in static random access memories is disclosed. The single event upset hardened memory cell includes a first set of cross-coupled transistors, a second set of cross-coupled transistors, and a set of isolation transistors. The set of isolation transistors is coupled to the first set of cross-coupled transistors such that two inversion paths are formed between the cross-coupled transistors and the isolation transistors.
Type:
Grant
Filed:
November 17, 1999
Date of Patent:
September 4, 2001
Assignees:
BAE Systems Information, Electronic Systems Integration, Inc.
Inventors:
Ho Gia Phan, Derwin Jallice, Bin Li, Joseph Hoffman