Patents Assigned to Electro-Scan Corporation
  • Patent number: 4720633
    Abstract: A scanning electron microscope useful for obtaining microscopic data or images of wet specimens is provided with comprises an electron source capable of emitting a beam of electrons; an electron optical vacuum column with means for focussing the beam of electrons; means for scanning the focussed beam of electrons across a specimen; a differentially pumped aperture column attached to the electron optical vacuum column and having at least two walls perpendicular to the sides of the differentially pumped aperture column defining a suitable series of pressure gradients, each wall having an aperture aligned to permit the beam of electrons to pass through said differentially pumped aperture column; a specimen chamber which may be maintained at normal atmospheric pressure; a specimen mount; means of preventing the buildup of negative charge on the surface of the specimen; and a detector and image recording system.
    Type: Grant
    Filed: January 17, 1986
    Date of Patent: January 19, 1988
    Assignee: Electro-Scan Corporation
    Inventor: Alan C. Nelson