Abstract: In the rolling probe, the measuring pole is designed as a rotating, rotationally symmetrical roller (4), such as a disk, cylinder or sphere, which directly contacts the surface of object to be measured (5) and is placed in the range of a sensor system. As a result, the maximum possible signal deviation can be fully used for the measuring. An increased measured value resolution and measuring accuracy especially in the measuring of thin sheets is achieved. Further, the actual thickness measuring takes place at the contact point with the layer to be measured. Thus, a true "one-point measuring" is involved.
Type:
Grant
Filed:
August 24, 1992
Date of Patent:
February 28, 1995
Assignee:
Elektro-Physik Hans Nix & Dr.-Ing. E. Steingroever GmbH & Co. Kommanditgesellschaft