Abstract: An inductively coupled plasma (ICP) torch is described that includes a tapered outer end. A system embodiment includes, but is not limited to, a tubular sample injector configured to receive an aerosolized sample in an interior defined by walls of the tubular sample injector; an inner tube surrounding at least a portion of the tubular sample injector to form a first annular space between the inner tube and the walls of the tubular sample injector, the inner tube defining at least one inlet port for introduction of an auxiliary gas into the first annular space; and an outer tube surrounding at least a portion of the inner tube to form a second annular space, the outer tube defining at least one inlet port for introduction of a cooling gas into the second annular space, the outer tube having a flared region at an outlet of the outer tube.

Abstract: A capillary tube holder is provided for holding a capillary tube. The capillary tube holder includes a holder insert and a holder base. The holder insert includes a capillary groove configured for receiving the capillary tube. The holder base is configured for slidably receiving and retaining the holder insert therein.

Abstract: Systems and methods are described to determine whether a sample transmitted through a transfer line from a remote sampling system contains a suitable sample to analyze by an analysis system. A system embodiment includes, but is not limited to, a sample receiving line configured to receive a liquid segment a first detector configured to detect the liquid segment at a first location in the sample receiving line; a second detector configured to detect the liquid segment at a second location in the sample receiving line downstream from the first location; and a controller configured to register a continuous liquid segment in the sample receiving line when the first detector and the second detector match detection states prior to the controller registering a change of state of the first detector.

Abstract: A sample introduction system is described that provides temperature-controlled handling and transfer of a sample from an autosampler, through a transfer line, to a heated environment proximate an analytical device. A system embodiment includes, but is not limited to, an autosampler including a temperature-controlled deck to support one or more sample containers; a heating unit including one or more heating elements to one or more fluids to be introduced to a sample removed from the one or more sample containers; a transfer line fluidically coupled with the autosampler and including a heating element configured to transfer heat to fluid flowing through the transfer line; and a sample handling system fluidically coupled with the transfer line and configured to fluidically couple with an analysis device, the sample handling system including a housing and a heating element configured to control a temperature of an environment defined by the housing.

Abstract: Systems and methods are described for integrated decomposition and scanning of a material, such as a semiconducting wafer, a scanning nozzle includes, but is not limited to, a nozzle body defining one or more nozzle ports to receive fluid for introduction to the surface of the material and to recover fluid from the surface of the material, and a nozzle hood extending from the nozzle body, the nozzle hood defining an inner channel longitudinally disposed along the nozzle body, the nozzle hood further defining one or more outer channels longitudinally disposed along the nozzle body, the inner channel fluidically coupled with the one or more outer channels via one or more gaps defined by the nozzle hood.

Abstract: Valve assemblies are described that provide magnetic coupling between a valve actuator and a valve body housing the valve rotor and stator. A valve assembly embodiment, includes, but is not limited to, a valve body, the valve body including at least one magnet, and a rotor and a stator configured to define a plurality of fluid flow passageways; a valve actuator configured to drive the rotor via a drive shaft; and an actuator mount coupled to the valve actuator and configured to magnetically couple with the at least one magnet of the valve body to magnetically couple the valve body and the valve actuator.

Abstract: An analysis system includes a degassing cell, at least one first valve, and at least one second valve. The at least one first valve is fluidly coupled with a top of the degassing cell, the at least one first valve configured selectably connect the degassing cell to a displacement gas flow and to a vacuum source. The at least one second valve is fluidly connected with a lateral side of the degassing cell and separately fluidly connected with a bottom of the degassing cell. The at least one second valve is selectably coupled with any of a source of a sample-carrying fluid, a transfer line configured to deliver a sample to an analysis device, or a waste output.

Abstract: Systems and methods are described for integrated decomposition and scanning of a semiconducting wafer, where a single chamber is utilized for decomposition and scanning of the wafer of interest.

Abstract: Systems and methods for analyzing ultra-low level concentration nanoparticles in semiconductor cleaning chemicals by single particle inductively coupled plasma mass spectrometry (spICP-MS) are described. In aspects, the methods described herein include determination factors that are specific to each of the chemical matrix and the type of analyte associated with the nanoparticles present in a fluid sample for both a particle baseline intensity value and a nanoparticle detection threshold.

Abstract: Systems and methods are described for isolating a sample at a valve prior to introduction to an analysis system, such as sample analysis via ICP-MS. A system embodiment can include, but is not limited to, a valve system including a first valve in fluid communication with a sample reservoir and a second valve configured to permit and block access of a vacuum source to the first valve; a sensor system configured to detect presence or absence of a fluid at the first valve; and a controller configured to control operation of the second valve to block access of the vacuum source to the first valve upon detection of the fluid at the first valve to isolate the fluid within the sample reservoir.

Abstract: Systems and methods for controlled, inline introduction of chemical agents to an inline fluid sample are described. A method embodiment includes, but is not limited to, receiving a fluid sample with a valve; receiving a chemical agent with the valve; introducing the fluid sample and the chemical agent inline via a mixing port of the valve to produce a mixed sample; transferring the mixed sample to a second valve; directing the mixed sample to a sample holding loop fluidically coupled with the second valve; holding the mixed sample within the sample holding loop for a holding period of time to permit a reaction between the fluid sample and the chemical agent; and directing the mixed sample from the sample holding loop to an analytic instrument following expiration of the holding period of time.

Abstract: An embodiment of an analysis system can include an initial multi-port valve, at least one intermediate multi-port valve, a further multi-port valve, and a time-of-flight mass spectrometer (TOF-MS). The initial multi-port valve can be configured to receive a sample. The at least one intermediate multi-port valve can be fluidly connected to the initial multi-port valve and configured to receive the sample from the initial multi-port valve. A given intermediate multi-port valve can have an ion-exchange column associated therewith. The given intermediate multi-port valve can be configured selectably to one of direct the sample through the ion-exchange column associated therewith (in a speciation mode) or bypass the ion-exchange column (in an infusion mode). The further multi-port valve can be fluidly connected with the at least one intermediate multi-port valve and configured to receive the sample from therefrom.

Abstract: Stabilization of an inductively coupled plasma mass spectrometer during analysis of semiconductor-grade chemical samples is described. A method embodiment includes, but is not limited to, transferring an aerosolized sample of a semiconductor-grade chemical into a hydrofluoric-acid resistant spray chamber; passing at least a portion of the aerosolized sample through an outlet tube of the hydrofluoric-acid resistant spray chamber; and introducing an impingement gas into the outlet tube of the hydrofluoric-acid resistant spray chamber to induce turbulence within the outlet tube to at least one of condition or remove large aerosol particles.

Abstract: A valve system includes, but is not limited to, a rotary valve; an actuator coupled with the rotary valve, wherein the actuator comprises a power connection fed from electronics associated with the actuator or coupled to the actuator; an actuator cap coupled with the actuator, the actuator cap configured to allow the power connection to pass through; a valve collar configured to be attached to the actuator cap, wherein the valve collar comprises an electronic feedthrough passage for the power connection; a sensor housing adjacent to the rotary valve and configured to support one or more sensors; and a retainer portion coupled with the rotary valve, the retainer portion configured to couple with the actuator cap through mating of respective retainer pins and apertures to allow electrical connection between the power connector and the sensor connector while remaining fixed with respect to the valve collar.

Abstract: Systems and methods are described for securing fabric, paper, and film samples for analysis by laser ablation. A method embodiment includes, but is not limited to, securing a thin, solid sample with a sample holder system, the sample holder system configured to hold the thin, solid sample in a taut configuration between a piston and a sample holder base; transferring the sample holder system to a laser ablation system; and ablating at least a portion of the thin, solid sample in the taut configuration with the laser ablation system to provide an ablated sample.

Abstract: A sample analysis system is available that can include a remote sampling system, at least one analyzer, and a controller. The remote sampling system can include a plurality of sample sources for providing a corresponding sample therefrom; and a plurality of sample collection devices selectively coupled to any of the plurality of sample sources for receiving at least one of the samples therefrom. The at least one analyzer can be coupled to the plurality of the sample collection devices for receiving at least one of the samples therefrom. The controller can be coupled with the remote sampling system and the at least one analyzer, the controller configured to control which of the sample sources is actively coupled to a given sample collection device at a given time.

Abstract: A system includes an analysis system at a first location and one or more remote sampling systems at a second location remote from the first location. A sampling system can be configured to receive a remote liquid sample. The system also includes a sample transfer line configured to transport gas from the second location to the first location. The sample transfer line is configured to selectively couple with a remote sampling for supplying a continuous liquid sample segment to the sample transfer line. The system can further include a sample receiving line at the first location. The sample receiving line is configured to selectively couple with the sample transfer line and the analysis system to receive the continuous liquid sample segment and supply the sample to an analysis device.

Abstract: Systems and methods are described for transporting sample using a first vacuum configuration and subsequently isolating the sample at a valve prior to introduction to an analysis system, where a second vacuum configuration transports other fluids through the system. A system embodiment can include, but is not limited to, a valve system including a first valve in fluid communication with a sample reservoir and a second valve having at least a first vacuum configuration to fluidically couple a first vacuum line with the first valve and having a second vacuum configuration to fluidically couple a second vacuum line with the first valve; a sensor system configured to detect presence or absence of a fluid at the first valve; and a controller configured to control operation of the second valve to block access of the first vacuum line to the first valve upon detection of the fluid at the first valve.

Abstract: Sample preparation systems and methods are described having pump control, valve configurations, and control logic that facilitate automatic, inline preparation dilutions of a sample according to at least two dilution operating modes. A system embodiment includes, but is not limited to a first pump configured to drive a carrier fluid; a second pump configured to drive a diluent; and a plurality of selection valves fluidically coupled with the first pump and the second pump, the plurality of selection valves being configured to direct fluid flows from the first pump and the second pump according to at least two modes of operation to provide a single-stage sample dilution according to a first operating mode and to provide a dual-stage sample dilution according to a second operating mode.

Abstract: Systems and methods are described for automatically adjusting the composition of a spray chamber matrix gas flow coordinated with an analysis of a particular chemical element or groups of elements. A system can include a spray chamber configured to be coupled to an analytical system, the spray chamber having a nebulizer gas port configured to receive a nebulizer gas; and an inlet for receiving a gas from at least one gas source. The system also includes a controller operably coupled to the spray chamber, the controller configured to adjust a gas flow rate of the gas from the at least one gas source in coordination with analysis of a particular chemical element by the analytical system.