Patents Assigned to ELMOS SEMICONDUCTOR ARTIENGESELLSCHAFT
  • Patent number: 9588337
    Abstract: A MEMS micromirror (30) is presented including a frame (60) with a mirror body (50) arranged therein, a cantilever beam assembly (70) and vertical support beams (40). The mirror body (50) is rotatable around a rotation axis (58) extending in a plane (x-y) defined by the frame (60). The cantilever beam assembly (70) has a longitudinal direction and extends within said plane. The vertical support beams (40) are connected between the mirror body (50) and the frame (60) along the rotation axis (58). The cantilever beam assembly (70) has a cantilever beam (72), being coupled at a first end via relief means (74) to the frame (60) and fixed at a second end (722) to the mirror body (50). The cantilever beam (72) has a thickness, perpendicular to a plane of the frame (60), that is smaller than its width in the plane of the frame (60).
    Type: Grant
    Filed: October 10, 2012
    Date of Patent: March 7, 2017
    Assignee: ELMOS SEMICONDUCTOR ARTIENGESELLSCHAFT
    Inventors: Hendrikus Wilhelmus Leonardus Antonius Maria Van Lierop, Matthijs Alexander Gerard Suijlen, Marijn Johannes Van Os