Patents Assigned to EMCORE Corporation
  • Patent number: 10641824
    Abstract: A semiconductor device comprises a device substrate and a metal film, with first and second non-recessed areal regions separated by a recessed areal region. The metal film covers contiguously the recessed and non-recessed areal regions and transition surfaces joining them. A first transition surface includes metallized portions over which (i) the first transition surface is not parallel to the other transition surface, (ii) the first transition surface is inclined relative to the device substrate, and (iii) the metal film on the first transition surface is contiguous with adjacent metal film portions on the recessed and non-recessed areal regions. A portion of an optoelectronic device surface running parallel to an optical waveguide of the device can be left exposed by a metal film on the device. Light propagating transversely out of the waveguide through the exposed portion can be detected, measured, or imaged for non-destructive device characterization or testing.
    Type: Grant
    Filed: December 1, 2017
    Date of Patent: May 5, 2020
    Assignee: Emcore Corporation
    Inventors: Xiaoguang He, Ruby Zendejaz, Dustin Huynh
  • Patent number: 10587094
    Abstract: A semiconductor laser source includes a partial-grating DFB laser with two laser electrodes, one over the grating and the other between the grating and one end of the laser. Constant laser currents flow into the waveguide through the electrodes (typically different from each other) and produce laser output. A wavelength discriminator, an optical detector, and a wavelength-control circuit act as a wavelength-control feedback mechanism to generate a wavelength control current that flows through one laser electrode or the other, or through both electrodes with opposite polarities. Phase noise on the laser output can be reduced at modulation frequencies exceeding several hundred kHz up to one or several tens of MHz or more. The laser-wavelength can be swept while exhibiting reduced phase noise.
    Type: Grant
    Filed: September 27, 2018
    Date of Patent: March 10, 2020
    Assignee: Emcore Corporation
    Inventor: Henry A. Blauvelt
  • Patent number: 10177854
    Abstract: A control circuit coupled to a light source and an optical modulator receives an electrical modulating signal with alternating active and idle temporal segments; the active temporal segments encode corresponding information. A portion of a source optical signal produced by the light source is transmitted by the modulator as the output optical signal. During idle temporal segments, the light source produces a non-zero source idle power level, and the modulator transmits at a constant idle transmission level. During active temporal segments, the light source produces a source average active power level, the modulator transmits at an average active transmission level that is higher than the idle transmission level, and the output optical signal is modulated in accordance with the electrical modulating signal, so that each active temporal segment of the output optical signal encodes the information of the corresponding active temporal segment of the electrical modulating signal.
    Type: Grant
    Filed: March 20, 2017
    Date of Patent: January 8, 2019
    Assignee: EMCORE CORPORATION
    Inventor: Henry A. Blauvelt
  • Patent number: 10074959
    Abstract: A modulated semiconductor laser source includes a waveguide on a semiconductor substrate; first and second reflectors; a laser electrode; an optical modulator; and a laser-electrode electrical circuit. The reflectors and a resonator segment of the waveguide define a laser resonator with laser output transmitted through the second reflector. The laser electrode is positioned over the resonator segment and a laser current flows through the laser electrode into the resonator segment to produce optical gain. The modulator receives and modulates the laser output, in response to a primary modulation signal, to produce a modulated output optical signal. The laser-electrode circuit is coupled to the laser electrode and derives from the primary modulation signal a laser-electrode secondary modulation current, optimized to reduce chirp in the modulated output signal, that flows through the laser electrode into or out of the resonator segment in addition to the laser current.
    Type: Grant
    Filed: August 3, 2016
    Date of Patent: September 11, 2018
    Assignee: EMCORE CORPORATION
    Inventors: Henry A. Blauvelt, Xiaoguang He, Kerry Vahala
  • Patent number: 9564733
    Abstract: A semiconductor device comprising a substrate; a monolithic gain region disposed on the substrate and operable to produce optical gain in response to current injection, including a first electrode over a first portion of the gain region having a first length L1, with a first current I1 being applied; and a second electrode over a second portion of the gain region having a second length L2, with a second current I2 being applied; wherein I1/L1 is greater than I2/L2.
    Type: Grant
    Filed: April 4, 2016
    Date of Patent: February 7, 2017
    Assignee: EMCORE CORPORATION
    Inventors: Henry A. Blauvelt, Xiaoguang He, Kerry Vahala
  • Patent number: 9564734
    Abstract: A method of making an optical modulator by determining the material composition of the quantum well region in the waveguide portion of the modulator so that the modulator is transparent at a gain peak wavelength that is greater than the predetermined wavelength by a predetermined amount, and fabricating the modulator with the determined material composition.
    Type: Grant
    Filed: March 25, 2016
    Date of Patent: February 7, 2017
    Assignee: EMCORE CORPORATION
    Inventors: Henry A. Blauvelt, Xiaoguang He, Kerry Vahala
  • Patent number: 9438007
    Abstract: An optical modulator including an information-containing radio frequency signal input; a semiconductor device having an optical input optically for receiving the coherent light beam, and a electrode connected to said radio frequency signal input and having a modulated bias potential so that current is generated in the second semiconductor device and extracted therefrom, while the coherent light beam is optically modulated by the signal changing the carrier density in the semiconductor device.
    Type: Grant
    Filed: June 15, 2015
    Date of Patent: September 6, 2016
    Assignee: EMCORE CORPORATION
    Inventors: Henry A. Blauvelt, Xiaoguang He, Kerry Vahala
  • Patent number: 9306372
    Abstract: A semiconductor device comprising a substrate; a monolithic gain region disposed on the substrate and operable to produce optical gain in response to current injection, including a first electrode over a first portion of the gain region having a first length L1, with a first current I1 being applied; and a second electrode over a second portion of the gain region having a second length L2, with a second current I2 being applied; wherein I1/L1 is greater than I2/L2.
    Type: Grant
    Filed: February 11, 2015
    Date of Patent: April 5, 2016
    Assignee: EMCORE CORPORATION
    Inventors: Henry A. Blauvelt, Xiaoguang He, Kerry Vahala
  • Publication number: 20150263484
    Abstract: A hybrid silicon/III-V compound semiconductor laser device comprising a silicon substrate including a channel configured for silicide line formation as a function of current through the channel; so that the temperature of the laser device is adjusted to a predetermined level.
    Type: Application
    Filed: May 19, 2014
    Publication date: September 17, 2015
    Applicant: Emcore Corporation
    Inventor: Jia-Sheng Huang
  • Publication number: 20150185582
    Abstract: A method of fabricating waveguide on a semiconductor substrate including an optical input at a first end region for receiving a continuous wave coherent light beam having a predetermined first beam profile, and a second end region opposite the first end region active layer for transferring the light beam with a predetermined second beam profile, including forming a sequence of layers including a bottom cladding layer, an active layer, and a top cladding layer on a semiconductor substrate; providing an appropriately configured mask over the region where a waveguide is to be formed; etching the semiconductor substrate down to the active layer thereby forming a partial waveguide structure; and re-growing the top cladding layer and the contact layer to the uniformly planar level of the top surface of the partial waveguide structure.
    Type: Application
    Filed: December 26, 2013
    Publication date: July 2, 2015
    Applicant: Emcore Corporation
    Inventors: Martin Kwakernaak, Xiaoguang He
  • Publication number: 20150187748
    Abstract: A semiconductor device or an integrated circuit formed on a substrate with shunt disposed on the substrate in parallel with the device or circuit and designed to form a closed circuit or discharge path when the device is subjected to an electrostatic discharge pulse.
    Type: Application
    Filed: January 2, 2014
    Publication date: July 2, 2015
    Applicant: Emcore Corporation
    Inventor: Jia-Sheng Huang
  • Patent number: 9071357
    Abstract: An optical fiber data communications network in which an electro-optical transceiver couples a plurality of serial electrical data buses over a single bidirectional optical fiber link, and includes a controller that functions by oversampling the digital electrical signal on each of such buses, multiplexes them, and converts the signal into a high speed optical signal for transmission over an optical fiber.
    Type: Grant
    Filed: July 11, 2014
    Date of Patent: June 30, 2015
    Assignee: EMCORE Corporation
    Inventors: Feng Shi, Sang Lee
  • Patent number: 9059801
    Abstract: An optical modulator including an information-containing radio frequency signal input; a semiconductor device having an optical input optically for receiving the coherent light beam, and a electrode connected to said radio frequency signal input and having a modulated bias potential so that current is generated in the second semiconductor device and extracted therefrom, while the coherent light beam is optically modulated by the signal changing the carrier density in the semiconductor device.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: June 16, 2015
    Assignee: Emcore Corporation
    Inventors: Henry A. Blauvelt, Xiaoguang He, Kerry Vahala
  • Publication number: 20150162990
    Abstract: A tunable laser transmitter configured in a small package subassembly coupled to a printed circuit board. The tunable laser transmitter includes a housing with a volume formed by exterior walls. An electrical input interface is positioned at the first end of the housing. A first and a second optical output interface is positioned at the second end of the housing, the first output being configured to transmit a modulated optical beam, and the second output configured to transmit a cw beam to the local oscillator of an external receiver.
    Type: Application
    Filed: December 9, 2013
    Publication date: June 11, 2015
    Applicant: Emcore Corporation
    Inventors: Andrew John Daiber, Frank Lei Ding
  • Publication number: 20150162723
    Abstract: A tunable laser configured in a small package subassembly including a gain chip positioned in the interior space between first and second tunable filter subassemblies. The tunable laser is packaged in either a rectangular or cylindrical housing, with an electrical input interface positioned at one end of the housing.
    Type: Application
    Filed: December 9, 2013
    Publication date: June 11, 2015
    Applicant: Emcore Corporation
    Inventor: Andrew John Daiber
  • Patent number: 9052238
    Abstract: An apparatus for analyzing, identifying or imaging an target including first and second laser beams coupled to a pair of photoconductive switches to produce CW signals in one or more bands in a range of frequencies greater than 100 GHz focused on and transmitted through or reflected from the target; and a detector for acquiring spectral information from signals received from the target and using a multi-spectral heterodyne process to generate an electrical signal representative of some characteristics of the target. The lasers are tuned to different frequencies and a frequency shifter in the path of one laser beam allows the terahertz beam to be finely adjusted in one or more selected frequency bands.
    Type: Grant
    Filed: September 20, 2013
    Date of Patent: June 9, 2015
    Assignee: Emcore Corporation
    Inventors: Ronald T. Logan, Jr., Joseph R. Demers
  • Patent number: 9014227
    Abstract: A method of fabricating a semiconductor laser device by forming a semiconductor structure at least part of which is in the form of a mesa structure having a flat top. The steps include depositing a passivation layer over the mesa structure, forming a contact opening in the passivation layer on the flat top of the mesa structure; and depositing a metal contact portion, with the deposited metal contact portion contacting the semiconductor structure via the contact opening. The contact opening formed through the passivation layer has a smaller area than the flat top of the mesa structure to allow for wider tolerances in alignment accuracy. The metal contact portion comprises a platinum layer between one or more gold layers to provide an effective barrier against Au diffusion into the semiconductor material.
    Type: Grant
    Filed: December 9, 2013
    Date of Patent: April 21, 2015
    Assignee: Emcore Corporation
    Inventors: Jia-Sheng Huang, Phong Thai
  • Patent number: 9000434
    Abstract: A semiconductor device including a semiconductor substrate having a surface including an active semiconductor device including one of a laser and a photodiode; and a visual indicator disposed on the semiconductor body and at least adjacent to a portion of said active semiconductor device, the indicator having a state that shows if damage to the active semiconductor device may have occurred.
    Type: Grant
    Filed: December 10, 2012
    Date of Patent: April 7, 2015
    Assignee: Emcore Corporation
    Inventors: Richard Carson, Elaine Taylor, Douglas Collins
  • Publication number: 20150078408
    Abstract: According to an embodiment of the invention, there is provided a micro integratable tunable laser assembly (m-ITLA) which includes an electrical interface for interfacing with a host, a tunable laser module for conducting optical communication, and a control unit, for at least controlling operation of the tunable laser module according to information received from the host via the electrical interface. The m-ITLA can have a length of about 37 mm or less and a width of about 20 mm or less.
    Type: Application
    Filed: May 23, 2013
    Publication date: March 19, 2015
    Applicant: Emcore Corporation
    Inventor: Heino Bukkems
  • Patent number: 8957377
    Abstract: An apparatus for analyzing, identifying or imaging an target including first and second laser beams coupled to a pair of photoconductive switches to produce CW signals in one or more bands in a range of frequencies greater than 100 GHz focused on and transmitted through or reflected from the target; and a detector for acquiring spectral information from signals received from the target and using a multi-spectral heterodyne process to generate an electrical signal representative of some characteristics of the target. The lasers are tuned to different frequencies and a frequency shifter in the path of one laser beam allows the terahertz beam to be finely adjusted in one or more selected frequency bands.
    Type: Grant
    Filed: October 15, 2013
    Date of Patent: February 17, 2015
    Assignee: Emcore Corporation
    Inventors: Ronald T. Logan, Joseph R. Demers