Abstract: A process is described for forming a plurality of polysilicon runs on the surface of a semiconductor substrate, such as a silicon substrate, at least one of the polysilicon runs having a resistor portion formed therein, and at least one of the polysilicon runs forming the conductive gate electrode of a self-aligned insulated silicon gate field effect device.
Type:
Grant
Filed:
February 10, 1978
Date of Patent:
July 29, 1980
Assignee:
EMM Semi
Inventors:
Kenneth L. Clark, George S. Leach, Robert W. Howard