Abstract: Disclosed are cross-linkable and cross-linked, functionalized poly(alkylene carbonates), processes for making them, and their use in photoresist compositions.
Type:
Grant
Filed:
December 27, 1999
Date of Patent:
June 19, 2001
Assignee:
Empower Materials Inc.
Inventors:
Joseph G. Sant'Angelo, Xiaomao Chen, Vincent D. McGinnis