Patents Assigned to Energetig Technology Inc.
  • Inductively-driven light source for lithography
    Publication number: 20060006345
    Abstract: An apparatus for producing light includes a chamber that has a plasma discharge region and that contains an ionizable medium. The apparatus also includes a magnetic core that surrounds a portion of the plasma discharge region. The apparatus also includes a pulse power system for providing at least one pulse of energy to the magnetic core for delivering power to a plasma formed in the plasma discharge region. The plasma has a localized high intensity zone.
    Type: Application
    Filed: July 9, 2004
    Publication date: January 12, 2006
    Applicant: Energetig Technology Inc.
    Inventors: Donald Smith, Stephen Horne, Matthew Besen, Paul Blackborow