Abstract: Disclosed herein are vibratory gyroscopes comprising hollow shell resonators and methods of fabricating thereof. Specifically, a vibratory gyroscope comprises a support substrate comprising a substrate primary surface and a resonator support surface, substantially perpendicular to the substrate primary surface. The gyroscope also comprises a hollow shell resonator comprising a resonator inner surface and a resonator outer surface such that the resonator inner surface defines a recessed region with a recessed region opening facing the substrate primary surface. At least one of the inner or outer resonator surfaces is attached to the resonator support surface of the support substrate adjacent to the inner edge surface of the resonator. The inner edge surface can be formed by a hollow stem with or without opening through this surface. Furthermore, the resonator support surface can be a continuous cylindrical surface or a segmented surface.

Abstract: Disclosed herein are vibratory gyroscopes comprising hollow shell resonators and methods of fabricating thereof. Specifically, a vibratory gyroscope comprises a support substrate comprising a substrate primary surface and a resonator support surface, substantially perpendicular to the substrate primary surface. The gyroscope also comprises a hollow shell resonator comprising a resonator inner surface and a resonator outer surface such that the resonator inner surface defines a recessed region with a recessed region opening facing the substrate primary surface. At least one of the inner or outer resonator surfaces is attached to the resonator support surface of the support substrate adjacent to the inner edge surface of the resonator. The inner edge surface can be formed by a hollow stem with or without opening through this surface. Furthermore, the resonator support surface can be a continuous cylindrical surface or a segmented surface.

Abstract: A method of adjusting an operating parameter of a miniature electromechanical resonator comprises measuring angular coordinates of first and second principal stiffness axes of first and second wine-glass mode of the miniature electromechanical resonator, respectively; determining first and second wine-glass mode frequencies of the resonator being resonant frequencies of the first and second principal stiffness axes, respectively; calculating one or more locations on the resonator for machining to reduce a difference between the first and second wine-glass mode frequencies; and machining the one or more locations on the resonator to reduce the difference between the first and second wine-glass mode frequencies.