Patents Assigned to Engineering Synthesis Design Inc.
  • Patent number: 6937347
    Abstract: A lateral-shear interferometer utilizes two relatively thick glass plates bonded together in a single block with a tilted air gap between opposing inner surfaces. The thickness of the glass plates is selected to be sufficiently large to separate the output beams from the light reflected from the top and bottom surfaces of the block, thereby eliminating the need for antireflection coatings. The shear interferometer is combined with an external mirror mounted on a tilt stage actuated by a computer-controlled tilt actuator to perform phase-shifting interferometric analysis in conventional manner.
    Type: Grant
    Filed: September 18, 2002
    Date of Patent: August 30, 2005
    Assignee: Engineering Synthesis Design Inc.
    Inventor: J. Kevin Erwin