Abstract: In a microvolume-liquid dispenser, there is performed an application operation for dispensing a microvolume liquid present in an amount measured in nanoliters or picoliters from a nozzle tip-end opening and applying the microvolume liquid to an application surface. When the application operation has not been performed over a time interval longer than a set time interval ta, a tip-end liquid surface of an application liquid in the nozzle tip-end opening is caused to vibrate at a high amplitude that includes the position of a liquid surface height from immediately before application in the case of application at equal time intervals. The subsequently performed application operation is performed at a point in time when the liquid surface height has returned to the liquid surface height. The operation for applying the microvolume application liquid can be precisely performed in the same manner as when application is performed at equal time intervals.
Abstract: In forming a plug 21 of a polycrystalline silicon film in a contact hole 19 to which a bit line BL is connected, the upper surface of the plug 21 is retracted downward from the upper edge of the contact hole 19, and a plug 22 of a laminate of a TiN film 26 and a W film 27 is formed on the plug 21. Then, the W film deposited on the contact hole 19 is patterned to form a bit line BL having a width narrower than the diameter of the contact hole 19. Here, the W film 27 constituting part of the plug 22 in the contact hole 19 is etched, but the TiN film 26 constituting another part of the plug 22 is not almost etched.
Type:
Grant
Filed:
August 16, 2000
Date of Patent:
June 10, 2003
Assignees:
Hitachi Ltd., Hitachi ULSI Engineering Systems Co., Ltd.
Abstract: A device for checking sheet packaging, whereby all the defects of packaged articles or sheets are easily and highly accurately detected based on the density or color distribution of reflection and transmission images. Defects such as deformation, discoloration, foreign matters and contamination of an article (16) packaged with a sheet and the sheet are detected by forming a density distribution code image or color code distribution image or by executing inter-image calculation based on a reflection image, a transmission image, or density or color images thereof. The upper and lower light sources are simultaneously turned on to separately form a reflection image and a transmission image from the input image in order to enhance the checking efficiency. Furthermore, a reflector (17) is disposed under a packaging sheet to enhance image contrast and to improve checking efficiency and stability. Optimum conditions for the kind and position of the reflector are clarified.
Abstract: A one-man helicopter 1 in which a drive transmission 10 that transmits driving force to upper and lower rotors 5 and 6 comprises first and second planet gear mechanisms 100 and 200 provided with a common carrier 104. When the common carrier 104 is rotated by a motor 301, a differential motion is generated between the two planet gear mechanisms. This results in the rotors being rotated at different velocities, which can be used to control yaw. A fore-and-aft swing mechanism 400 and right-and-left swing mechanism 500 depend from the lower end of a vertical shaft 41 on which the rotors are supported. Moving a stick 8 forward or backward, or to either side, tilts the vertical shaft 41 in the same direction. When the stick 8 is not subjected to a controlling force, the vertical shaft 41 reverts automatically to its original vertical state. This configuration makes it possible to realize a coaxial twin-rotor type helicopter having a compact, structurally simple control mechanism.