Abstract: A high-power radio-frequency amplifier acts on periodic pulses of RF energy. The bias is controlled for each of a bank of FETs or other amplifier devices that constitutes the main power stage. A sample of bias current is obtained during a blanking period on the front porch of the RF gating period. Quiescent drain current is measured, and stored on a sample/hold circuit. A digital signal processor provides bias values that are sent via a D/A converter to biasing circuits that add the bias levels to the input RF signal. If the bias current is above or below a desired level, the stored bias level is decreased or incremented respectively. A timing control circuit gates the sample/hold circuit and switches in advance of the biasing circuits. The timing control circuit also creates a blanking signal to apply to an attenuator to produce a null region during the first 100 microseconds of the gating signal.

Abstract: A high-power radio-frequency amplifier act on periodic pulses of RF energy. The bias is controlled for each of a bank of FETs or other amplifier devices that constitutes the main power stage. A sample of bias current is obtained during a blanking period on the front porch of the RF gating period. Quiescent drain current is measured, and stored on a sample/hold circuit. A digital signal processor provides bias values that are sent via a D/A converter to biasing circuits that add the bias levels to the input RF signal. If the bias current is above or below a desired level, the stored bias level is decreased or incremented respectively. A timing control circuit gates the sample/hold circuit and switches in advance of the biasing circuits. The timing control circuit also creates a blanking signal to apply to an attenuator to produce a null region during the first 100 microseconds of the gating signal.

Abstract: An RF generator has an analog feedback circuit in combination with a digital levelling assist circuit to compensate for non-linearities in the power metering circuit that measures the RF output energy. The digital leveling assist circuit has a digitizer with inputs coupled to receive the measured power voltage supplied from the power metering circuit and a power demand voltage. The digitizer has outputs that provide digital representations of the measured power voltage and the power demand voltage to a digital control element that derives a digital correction factor based on these digital representations. A d/a converter coupled to the digital control element provides a correction voltage corresponding to this digital correction factor, and this is furnished to a summing circuit that combines the correction voltage with the power demand voltage and with a control voltage that is supplied by the analog feedback circuit.

Abstract: A high-power RF feedback resistor assembly includes a flat film resistor or other flat device mounted in thermal communication onto a bushing which is, in turn, mounted directly onto a cooling flange of an associated power transistor. A bushing has a vertical bolt hole through it to receive a threaded screw. The bushing can have a cutout beneath the flat vertical surface on which the resistor is mounted to provide clearance for a printed circuit board.

Abstract: A dc-dc converter employs both half-bridge topology and current-mode switching control. The controller operates by sensing the current that flows through the transformer that is interposed between the node of two series switches and the node between the two split capacitors. The controller develops gating signals to close and open the switches based on the rise of current to a predetermined command level. A gate signal for the second switch, which is developed between actuations of the first switch, has its pulse width made equal to the period that the first switch was closed. This maintains a balanced voltage-time product, so that the series or split capacitors remain in balance. The controller can include a sample gating circuit with a comparator that receives the current sample signal and the command level. The track side signal which develops the gating pulse for the other switch can be developed with analog circuitry, i.e. by charging a capacitor, or else digitally, i.e. by clock pulse counting.

Abstract: A harmonic and subharmonic filter is coupled between a high power RF energy source and a non-linear RF load via a matching network, such as a plasma chamber. The filter passes high power RF energy in a band centered on a predetermined radio frequency, i.e., 13.56 MHz, but blocks and attenuates out-of-band energy at frequencies which are multiples of or fractions of the predetermined frequency. The harmonic and subharmonic filter comprises an input terminal, an output terminal, a series LC resonance path connected between the input and output terminals, and tuned to the predetermined radio frequency, a series resistive path formed of first and second resistors, and a parallel LC resonance path between the junction of the two resistors and ground.