Abstract: A plasma reactor consisting of a plurality of elements placed between two or more plasma generating electrodes is presented. Said elements consisting of surfaces, conducting, and/or dielectric which allow for the dielectric isolation of the electrodes from each other and creating a plurality of dielectrically isolated spaces for plasma generation. This plasma reactor achieves a high surface area, with low capacitance allowing simplified construction and is suitable for high frequency operation.
Type:
Grant
Filed:
June 5, 2009
Date of Patent:
September 1, 2015
Assignee:
EON LABS, LLC
Inventors:
Walter Riley Buchanan, Christopher Daniel Hruska
Abstract: A plasma reactor consisting of a plurality of elements placed between two or more plasma generating electrodes is presented. Said elements consisting of surfaces, conducting, and/or dielectric which allow for the dielectric isolation of the electrodes from each other and creating a plurality of dielectrically isolated spaces for plasma generation. This plasma reactor achieves a high surface area, with low capacitance allowing simplified construction and is suitable for high frequency operation.
Type:
Application
Filed:
June 5, 2009
Publication date:
December 9, 2010
Applicant:
EON LABS, LLC
Inventors:
Walter Riley Buchanan, Christopher Daniel Hruska