Patents Assigned to ESC, Inc.
  • Patent number: 6627587
    Abstract: An aqueous cleaning composition comprising an alkanolamine, a tetraalkylammonium hydroxide, nonmetallic fluoride salt, a corrosion inhibitor, e.g. ascorbic acid or its derivatives alone or in combination, balance water. Such cleaning compositions are effective to remove residues from plasma process generated organic, metal-organic materials, inorganic salts, oxides, hydroxides or complexes in combination with or exclusive of organic photoresist films at low temperatures with little corrosion of copper and attack of dielectric substrates.
    Type: Grant
    Filed: April 19, 2001
    Date of Patent: September 30, 2003
    Assignee: ESC Inc.
    Inventors: Shahriar Naghshineh, Yassaman Hashemi
  • Publication number: 20030017962
    Abstract: An aqueous cleaning composition comprising an alkanolamine, a tetraalkylammonium hydroxide, nonmetallic fluoride salt, a corrosion inhibitor, e.g. ascorbic acid or its derivatives alone or in combination, balance water. Such cleaning compositions are effective to remove residues from plasma process generated organic, metal-organic materials, inorganic salts, oxides, hydroxides or complexes in combination with or exclusive of organic photoresist films at low temperatures with little corrosion of copper and attack of dielectric substrates.
    Type: Application
    Filed: April 19, 2001
    Publication date: January 23, 2003
    Applicant: ESC, Inc
    Inventors: Shahriar Naghshineh, Yassaman Hashemi
  • Patent number: 6492308
    Abstract: A cleaning solution for cleaning microelectronic substrates, particularly for post-CMP or via formation cleaning. The cleaning solution comprises a quaternary ammonium hydroxide, an organic amine, a corrosion inhibitor, and water. A preferred cleaning solution comprises tetramethylammonium hydroxide, monoethylanolamine, ascorbic acid, and water with the alkalinity of the cleaning solution greater than 0.073 milliequivalents base per gram of solution.
    Type: Grant
    Filed: June 6, 2000
    Date of Patent: December 10, 2002
    Assignee: ESC, Inc.
    Inventors: Shahriar Naghshineh, Jeff Barnes, Dingying Xu
  • Publication number: 20010004633
    Abstract: A cleaning solution for cleaning microelectronic substrates, particularly for post-CMP or via formation cleaning. The cleaning solution comprises a quaternary ammonium hydroxide, an organic amine, a corrosion inhibitor, optionally an organic acid, and water. A preferred cleaning solution comprises tetramethylammonium hydroxide, monoethylanolamine, gallic acid ascorbic acid, and water with the alkalinity of the cleaning solution greater than 0.073 milliequivalents base per gram of solution.
    Type: Application
    Filed: February 12, 2001
    Publication date: June 21, 2001
    Applicant: ESC, Inc.
    Inventors: Shahriar Naghshineh, Jeff Barnes, Ewa B. Oldak
  • Patent number: 6194366
    Abstract: A cleaning solution is provided for cleaning copper-containing microelectronic substrates, particularly for post-CMP or Via formation cleaning. The cleaning solution comprises a quaternary ammonium hydroxide, an organic amine, a corrosion inhibitor, and water. A preferred cleaning solution comprises tetramethylammonium hydroxide, monoethanolamine, gallic acid, and water. The pH of the cleaning solution is greater than 10.
    Type: Grant
    Filed: November 16, 1999
    Date of Patent: February 27, 2001
    Assignee: ESC, Inc.
    Inventors: Shahriar Naghshineh, Jeff Barnes, Yassaman Hashemi, Ewa B. Oldak
  • Patent number: 5405368
    Abstract: A therapeutic treatment device includes a housing and an incoherent light source such as a flashlamp disposed in the housing. The flashlamp provides a pulsed light output for treatment of external skin disorders. To provide light to the treatment area the housing has an opening that is disposed adjacent a skin treatment area. A reflector is mounted within the housing near proximate the light source to reflect the light to the treatment area. At least one optical filter and an iris are mounted near the opening in the housing. Power to the lamp is provided by a pulse forming circuit that can provide a variable pulse width.
    Type: Grant
    Filed: October 20, 1992
    Date of Patent: April 11, 1995
    Assignee: ESC Inc.
    Inventor: Shimon Eckhouse